公开(公告)号：KR1020140099409A

公开(公告)日：2014-08-12

申请号：KR1020130012071

申请日：2013-02-01

Applicant: 국민대학교산학협력단

Inventor： 이재갑 ,  이영규 ,  정대균

IPC: H01L21/027

CPC classification number: H01L21/0273 ,  H01L21/02252 ,  H01L21/02315

Abstract: The present application relates to a method for transferring a solvent pattern which comprises the steps of: forming a hydrophilic self-assembling monolayer having hydrophilicity to a substrate; obtaining a patterned mold; forming a hydrophilic solvent pattern on a surface of the patterned mold by applying a hydrophilic solvent to the patterned mold; and transferring the hydrophilic solvent pattern of the mold to the substrate by enabling the mold having the hydrophilic solvent pattern to come into contact with the substrate in which the hydrophilic self-assembling monolayer is formed.

Abstract translation: 本申请涉及一种转移溶剂图案的方法，包括以下步骤：形成亲水性亲水性的单层至基材; 获得图案模具; 通过向图案化的模具施加亲水性溶剂，在图案化模具的表面上形成亲水性溶剂图案; 并且通过使具有亲水性溶剂图案的模具与形成有亲水性自组装单层的基材接触，将模具的亲水性溶剂图案转印到基材上。