Abstract:
PURPOSE: A surface plasmon resonance sensor chip, a manufacturing method thereof, a SPR system, and a detecting method of a material using the same are provided to detect a low molecular material or a tiny material by improving sensitivity to the material. CONSTITUTION: An SPR sensor chip(100) comprises a substrate(110), a metal film(120), a first dielectric layer(130), and a metallic nano-particle layer. The metal film is formed on the substrate. The first dielectric layer is formed on the metal film. The metallic nano-particle layer is formed on the first dielectric layer, and composed of metallic nano-particles.