실록산막 및 이를 포함하는 산화물 박막 트랜지스터
    1.
    发明公开
    실록산막 및 이를 포함하는 산화물 박막 트랜지스터 有权
    硅氧烷层和氧化物薄膜晶体管使用它

    公开(公告)号:KR1020100041530A

    公开(公告)日:2010-04-22

    申请号:KR1020080100762

    申请日:2008-10-14

    CPC classification number: C08J5/22 C08K5/544 H01L29/78606 H01L29/7869

    Abstract: 실록산막및 이를포함하는산화물박막트랜지스터를개시한다. 개시된유기막은 Aminophenyltrimethoxysilane(APheTMS) 및 Aminopropyltrimethoxysilane (APTMS)로형성된것으로산화물박막트랜지스터를포함하는전자소자에사용될수 있다.

    Abstract translation: 目的:提供硅氧烷层以确保低的加工温度和对丙酮等有机溶剂的耐受性,并提高漏电流特性。 构成:通过氨基苯基三甲氧基硅烷和氨基丙基三甲氧基硅烷的缩聚形成硅氧烷层。 氨基苯基三甲氧基硅烷和氨基丙基三甲氧基硅烷的含量比为0.1:99.9mol%-99.9:0.1mol%。 氧化物薄膜晶体管包括形成在基板(10)上的栅极(11),栅极绝缘层(12),形成在栅极绝缘层上的沟道(13),源极(14a)和漏极(14b) 形成在通道的两端和形成在通道,源极和漏极上的硅氧烷层(15)。

    브리지드 실세스퀴옥산 재료를 이용한 OTFT 소자
    2.
    发明公开
    브리지드 실세스퀴옥산 재료를 이용한 OTFT 소자 无效
    使用桥接SILSESQUIOXANE薄膜材料的OTFT器件

    公开(公告)号:KR1020110092895A

    公开(公告)日:2011-08-18

    申请号:KR1020100012581

    申请日:2010-02-10

    Inventor: 정현담 이덕희

    CPC classification number: C08J5/18 C08G77/04 H01L51/052

    Abstract: PURPOSE: An OTFT device using a bridged silsesquioxane material is provided to form a gate insulator thin film and an organic thin film transistor using the bridged silsesquioxane material as a gate insulator with reduced surface energy, improved crystallinity, and decreased surface roughness. CONSTITUTION: A method for preparing an insulator thin film comprises the steps of: mixing the bridged siloxane material of chemical formula 3, the siloxane material of chemical formula 4, water(H2O), and hydrochloric acid solution; forming a bridged silsesquioxane polymer of chemical formula 1 by polymerizing the mixture at room temperature; applying the polymer composition to a substrate and curing the resultant. In chemical formulas 1, 3 and 4, R1 and R21 are selected from (C2-C6) alkylene, (C6-C12) arylene and (C1-C10) alkyl (C6-C12) arylene; and R2 ~R11 and R22~R32 are independently (C1-C6) alkyl; and m is the interger of 2~1000.

    Abstract translation: 目的:提供使用桥接倍半硅氧烷材料的OTFT器件,以形成栅极绝缘体薄膜和使用桥连倍半硅氧烷材料作为具有降低的表面能,改进的结晶度和降低的表面粗糙度的栅极绝缘体的有机薄膜晶体管。 构成:制备绝缘体薄膜的方法包括以下步骤:将化学式3的桥接硅氧烷材料,化学式4的硅氧烷材料,水(H 2 O)和盐酸溶液混合; 通过在室温下聚合混合物形成化学式1的桥连倍半硅氧烷聚合物; 将聚合物组合物施加到基底上并固化所得物。 在化学式1,3和4中,R 1和R 21选自(C 2 -C 6)亚烷基,(C 6 -C 12)亚芳基和(C 1 -C 10)烷基(C 6 -C 12)亚芳基; R2〜R11和R22〜R32独立地为(C1-C6)烷基; m为2〜1000的整数。

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