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公开(公告)号：KR102143778B1
公开(公告)日：2020-08-12
申请号：KR1020180125385
申请日：2018-10-19
Applicant: 한국과학기술연구원
IPC: H01L27/146 , H01L31/109 , H01L31/072 , H01L31/032
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