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公开(公告)号:KR102042680B1
公开(公告)日:2019-11-08
申请号:KR1020180045198
申请日:2018-04-18
Applicant: 한국과학기술연구원
IPC: H01L21/02 , H01L21/285 , H01L21/3213
公开(公告)号:KR102042680B1
公开(公告)日:2019-11-08
申请号:KR1020180045198
申请日:2018-04-18
Applicant: 한국과학기술연구원
IPC: H01L21/02 , H01L21/285 , H01L21/3213