公开(公告)号：KR101054893B1

公开(公告)日：2011-08-05

申请号：KR1020110020982

申请日：2011-03-09

Applicant: 한국에너지기술연구원

Inventor： 윤우영 ,  이재우 ,  이창범 ,  정주호 ,  이진석 ,  장보윤 ,  김준수 ,  안영수

IPC: C01B33/02 ,  B22D25/04 ,  C30B29/06 ,  H01L31/04

CPC classification number: Y02E10/50 ,  B22D11/045 ,  C30B11/006

Abstract: PURPOSE: An apparatus for manufacturing a silicon substrate using a spin casting process and a method for manufacturing the silicon substrate using the same are provided to easily control the thickness and the shaft of the silicon substrate without a separate shaping unit. CONSTITUTION: A chamber(110) arranges a sealed space. A storing container(122) is arranged in the chamber, and a raw silicon material is introduced in the storing container. A discharging hole is formed at the bottom side of the storing container. A melting part(120) is arranged around the storing container and includes a heater melting the raw silicon material. A casting part(140) spin-casts the melted silicon from the discharging hole. A cooling part(160) cools the spin-cased silicon. A temperature measuring part(180) measures the temperature of the melting part.

Abstract translation: 目的：提供一种使用旋转铸造工艺制造硅衬底的装置和使用其的制造硅衬底的方法，以便容易地控制硅衬底的厚度和轴，而无需单独的成形单元。 构成：室（110）布置密封空间。 储存容器（122）布置在室中，原料硅材料被引入存储容器中。 在储存容器的底侧形成有排出孔。 熔化部分（120）围绕储存容器设置，并且包括熔化原料硅的加热器。 铸造部件（140）将来自排出孔的熔融硅旋转铸造。 冷却部件（160）冷却旋转硅。 温度测量部件（180）测量熔化部件的温度。