公开(公告)号：EP1311865A4

公开(公告)日：2007-05-30

申请号：EP01914690

申请日：2001-03-02

Applicant: ADE CORP

Inventor： MALLORY ROY E ,  CARTER RICHARD B

IPC: G01B7/14 ,  G01B7/00 ,  G01D5/24 ,  G01R27/26

CPC classification number: G01B7/003 ,  G01D5/24

Abstract: A capacitive displacement sensor (10) for measuring thin targets (20) is presented. The plate of the measurement probe is designed to take into account the thin target shape and to provide accurate measurements of the thin target by reducing lateral movement sensitivity of the plate. The probe may also include a guard (30) to reduce capacitive coupling of the plate with other structures which would affect the accuracy of the measurement.