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1.
公开(公告)号:US12234338B2
公开(公告)日:2025-02-25
申请号:US16311888
申请日:2017-06-21
Applicant: BASF SE
Inventor: Uwe Keppeler , Juergen Bartl , Juergen Ahlers , Christian Daeschlein , Peter Gutmann , Frank Prissok
Abstract: A process for producing foam particles composed of thermoplastic elastomers having polyamide segments, comprising the steps: (a) production of a suspension of pellets of the thermoplastic elastomer in a suspension medium, (b) addition of a blowing agent, (c) impregnation of the pellets with the blowing agent by heating of the suspension in a pressure vessel to an impregnation temperature IMT at an impregnation pressure IMP, depressurization of the suspension by emptying of the pressure vessel via a depressurization device and work-up of the foam particles obtained, and also foam particles obtainable by the process.
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公开(公告)号:US11993729B2
公开(公告)日:2024-05-28
申请号:US16765665
申请日:2018-11-12
Applicant: BASF SE
Inventor: Christian Daeschlein , Max Siebert , Yongqing Lan , Michael Lauter , Sheik Ansar Usman Ibrahim , Reza M Golzarian , Te Yu Wei , Haci Osman Guevenc , Julian Proelss , Leonardus Leunissen
IPC: C09G1/02 , H01L21/321
CPC classification number: C09G1/02 , H01L21/3212
Abstract: The presently claimed subject matter is directed to a chemical mechanical polishing (CMP) composition comprising inorganic particles, at least one organic compound comprising an amino group and/or at least one acid group (Y), potassium persulfate, at least one corrosion inhibitor and an aqueous medium for polishing substrates of the semiconductor industry comprising cobalt and/or a cobalt alloy and TiN and/or TaN.
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