公开(公告)号：DE19614506B4

公开(公告)日：2006-01-12

申请号：DE19614506

申请日：1996-04-12

Applicant: CASCADE MICROTECH INC

Inventor： STRID ERIC W ,  SCHAPPACHER JERRY B ,  CARLTON DALE E ,  GLEASON K REED

IPC: G01R31/26 ,  G01R1/00 ,  G01R1/067 ,  G01R1/073 ,  G01R31/02 ,  G01R31/28 ,  G01R35/00 ,  H01L21/66

Abstract: An interconnect assembly for evaluating a probe measurement network includes a base, respective inner and outer probing areas in mutually coplanar relationship on the upper face of the base, a reference junction, and a high-frequency transmission structure connecting the probing areas and the reference junction so that high-frequency signals can be uniformly transferred therebetween. A preferred method for evaluating the signal channels of the network includes connecting a reference unit to the reference junction and successively positioning each device-probing end that corresponds to a signal channel of interest on the inner probing area.

公开(公告)号：DE19614506A1

公开(公告)日：1996-10-17

申请号：DE19614506

申请日：1996-04-12

Applicant: CASCADE MICROTECH INC

Inventor： STRID ERIC W ,  SCHAPPACHER JERRY B ,  CARLTON DALE E ,  GLEASON K REED

IPC: G01R31/26 ,  G01R1/00 ,  G01R1/067 ,  G01R1/073 ,  G01R31/02 ,  G01R31/28 ,  G01R35/00 ,  H01L21/66

Abstract: An interconnect assembly for evaluating a probe measurement network includes a base, respective inner and outer probing areas in mutually coplanar relationship on the upper face of the base, a reference junction, and a high-frequency transmission structure connecting the probing areas and the reference junction so that high-frequency signals can be uniformly transferred therebetween. A preferred method for evaluating the signal channels of the network includes connecting a reference unit to the reference junction and successively positioning each device-probing end that corresponds to a signal channel of interest on the inner probing area.