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1.发明公开METHOD AND TECHNIQUE TO CONTROL MEMS DVC CONTROL WAVEFORM FOR LIFETIME ENHANCEMENT 有权方法与设备MEMS控DVC控制波形改善生活
公开(公告)号：EP2996983A1
公开(公告)日：2016-03-23
申请号：EP14728400.4
申请日：2014-05-16
Applicant: Cavendish Kinetics Inc.
Inventor： KHIEU, Cong Quoc , HUFFMAN, James Douglas , KNIPE, RichardL. , JOSHI, Vikram , VAN KAMPEN, Robertus Petrus
CPC classification number: H02N1/006 , B81B7/008 , B81B7/02 , B81B2201/0221 , H01G5/011 , H01G5/18 , H01H59/0009 , H03J2200/39
Abstract: The present invention generally relates to a method of operating a MEMS DVC while minimizing impact of the MEMS device on contact surfaces. By reducing the drive voltage upon the pull-in movement of the MEMS device, the acceleration of the MEMS device towards the contact surface is reduced and thus, the impact velocity is reduced and less damage of the MEMS DVC device occurs.
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