公开(公告)号：DE19603043C2

公开(公告)日：1997-11-27

申请号：DE19603043

申请日：1996-01-29

Applicant: IBM

Inventor： BARTHA JOHANN DIPL PHYS DR ,  DRUSCHKE FRANK DIPL CHEM DR ,  ELSNER GERHARD DIPL PHYS DR ,  GRESCHNER JOHANN DIPL PHYS DR

IPC: B41J2/415 ,  H01J3/04 ,  H01J27/26 ,  B41J2/41 ,  H01L21/306

公开(公告)号：DE19603043A1

公开(公告)日：1997-08-21

申请号：DE19603043

申请日：1996-01-29

Applicant: IBM

Inventor： BARTHA JOHANN DIPL PHYS DR ,  DRUSCHKE FRANK DIPL CHEM DR ,  ELSNER GERHARD DIPL PHYS DR ,  GRESCHNER JOHANN DIPL PHYS DR

IPC: B41J2/415 ,  H01J3/04 ,  H01J27/26 ,  B41J2/41 ,  H01L21/306

Abstract: The ion generator includes a dielectric plate (1) comprising a number of electrodes (3) on one surface (1a), and covered with a structured conductive layer (2). A number of dielectric spacers (4) have respective second electrodes (5) on the side facing away from the dielectric plate. The spacers are connected to the first surface (1a) of the dielectric plate in such a way that cavities are formed by the first electrodes, parts of the first surface of the dielectric plate, and by the spacers with the second electrodes. The cavities accommodate the generated plasma. The ion generator is formed in a micromechanical process. The dielectric plate and the dielectric spacers are formed in a modular fashion and connected by adhesive points (7) or bonding points (7).