Saved successfully
Save failed
Saved Successfully
Save Failed
公开(公告)号:JPS61177738A
公开(公告)日:1986-08-09
申请号:JP20460485
申请日:1985-09-18
Applicant: IBM
Inventor: BECKMAN KEITH FOWLER , KOLMAN ANNE ELIZABETH , MCGUIRE KATHLEEN MARY , PUTTLITZ KARL JOSEPH , QUINONES HORATIO
IPC: H01L21/60 , H01L21/56 , H05K3/28 , H05K3/34