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公开(公告)号：DE69227210T2
公开(公告)日：1999-06-02
申请号：DE69227210
申请日：1992-02-11
Applicant: IBM
Inventor： CORNETT KATHLEEN MARIE , HEFFERON GEORGE JOSEPH , MONTGOMERY MELVIN WARREN , MOREAU WAYNE MARTIN
IPC: G03F7/004 , G03F7/022 , G03F7/16 , H01L21/027
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公开(公告)号：DE69227210D1
公开(公告)日：1998-11-12
申请号：DE69227210
申请日：1992-02-11
Applicant: IBM
Inventor： CORNETT KATHLEEN MARIE , HEFFERON GEORGE JOSEPH , MONTGOMERY MELVIN WARREN , MOREAU WAYNE MARTIN
IPC: G03F7/004 , G03F7/022 , G03F7/16 , H01L21/027
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