公开(公告)号：JP2002361600A

公开(公告)日：2002-12-18

申请号：JP2002031640

申请日：2002-02-08

Applicant: IBM

Inventor： MISEWICH JAMES ,  MURRAY CHRISTOPHER B ,  SCHROTT ALEJANDRO G

IPC: B82B3/00 ,  G01B11/16 ,  G01Q60/00 ,  G01Q80/00 ,  G11B5/85 ,  G11B5/851 ,  H01L21/027 ,  H01L21/8246 ,  H01L27/105

Abstract: PROBLEM TO BE SOLVED: To provide a method of assembling an array of particulates or molecules using an atomic force microscope for partitioning a ferro-dielectric magnetic domain. SOLUTION: A ferro-dielectric thin film 12 is attached onto a base board 11 which forms a work to be processed, and patterns are formed on the thin film using atomic force microscope which has an electroconductive probe 13 so that the desired nano-circuit pattern is partitioned. Then a selected region on the thin film is exposed to a solution containing chemical seed(s) to be adsorbed or accumulated selectively under influence of the electrophoretic force.