公开(公告)号：DE60015189D1

公开(公告)日：2004-11-25

申请号：DE60015189

申请日：2000-11-28

Applicant: IBM

Inventor： BEYELER RENE ,  BLOECHL PETER ,  BONA GIAN-LUCA ,  GERMANN W ,  HORST FOLKERT ,  OFFREIN J ,  SALEMINK L ,  WIESMANN W

IPC: G02B6/12 ,  C01B21/082 ,  C01B21/087 ,  C03B19/14 ,  C03C1/02 ,  C03C3/04 ,  C03C3/11 ,  C23C16/30 ,  C23C16/40 ,  G02B6/10 ,  G02B6/122 ,  G02B6/13 ,  G02B6/132

Abstract: A new material is provided that can be used for the fabrication of planar optical waveguides. The material includes silicon, oxygen and nitrogen and additionally deuterium. Also provided is a method for fabricating planar optical waveguides based on this new material, which uses deuterated gaseous precursors.

公开(公告)号：DE60015189T2

公开(公告)日：2006-03-09

申请号：DE60015189

申请日：2000-11-28

Applicant: IBM

Inventor： BEYELER RENE ,  BLOECHL PETER ,  BONA GIAN-LUCA ,  GERMANN W ,  HORST FOLKERT ,  OFFREIN J ,  SALEMINK L ,  WIESMANN W

IPC: G02B6/12 ,  C01B21/082 ,  C01B21/087 ,  C03B19/14 ,  C03C1/02 ,  C03C3/04 ,  C03C3/11 ,  C23C16/30 ,  C23C16/40 ,  G02B6/10 ,  G02B6/122 ,  G02B6/13 ,  G02B6/132

Abstract: A new material is provided that can be used for the fabrication of planar optical waveguides. The material includes silicon, oxygen and nitrogen and additionally deuterium. Also provided is a method for fabricating planar optical waveguides based on this new material, which uses deuterated gaseous precursors.