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公开(公告)号：DE60015189D1
公开(公告)日：2004-11-25
申请号：DE60015189
申请日：2000-11-28
Applicant: IBM
Inventor： BEYELER RENE , BLOECHL PETER , BONA GIAN-LUCA , GERMANN W , HORST FOLKERT , OFFREIN J , SALEMINK L , WIESMANN W
IPC: G02B6/12 , C01B21/082 , C01B21/087 , C03B19/14 , C03C1/02 , C03C3/04 , C03C3/11 , C23C16/30 , C23C16/40 , G02B6/10 , G02B6/122 , G02B6/13 , G02B6/132
Abstract: A new material is provided that can be used for the fabrication of planar optical waveguides. The material includes silicon, oxygen and nitrogen and additionally deuterium. Also provided is a method for fabricating planar optical waveguides based on this new material, which uses deuterated gaseous precursors.
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公开(公告)号：DE69902800T2
公开(公告)日：2003-05-28
申请号：DE69902800
申请日：1999-10-01
Applicant: IBM
Inventor： BLOECHL PETER , BONA GIAN-LUCA , GERMANN W , HORST FOLKERT , MASSAREK ILLANA , OFFREIN JAN , SALEMINK L
Abstract: An optical waveguide device is proposed which comprises a substrate, thereupon a lower cladding layer, thereupon an upper cladding layer and between said cladding layers a waveguide element. The influence of the substrate on the stress-induced birefringence of the optical waveguide device is reduced by modification of the substrate from underneath the waveguide element.
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公开(公告)号：DE60015189T2
公开(公告)日：2006-03-09
申请号：DE60015189
申请日：2000-11-28
Applicant: IBM
Inventor： BEYELER RENE , BLOECHL PETER , BONA GIAN-LUCA , GERMANN W , HORST FOLKERT , OFFREIN J , SALEMINK L , WIESMANN W
IPC: G02B6/12 , C01B21/082 , C01B21/087 , C03B19/14 , C03C1/02 , C03C3/04 , C03C3/11 , C23C16/30 , C23C16/40 , G02B6/10 , G02B6/122 , G02B6/13 , G02B6/132
Abstract: A new material is provided that can be used for the fabrication of planar optical waveguides. The material includes silicon, oxygen and nitrogen and additionally deuterium. Also provided is a method for fabricating planar optical waveguides based on this new material, which uses deuterated gaseous precursors.
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公开(公告)号：DE69902800D1
公开(公告)日：2002-10-10
申请号：DE69902800
申请日：1999-10-01
Applicant: IBM
Inventor： BLOECHL PETER , BONA GIAN-LUCA , GERMANN W , HORST FOLKERT , MASSAREK ILLANA , OFFREIN JAN , SALEMINK L
Abstract: An optical waveguide device is proposed which comprises a substrate, thereupon a lower cladding layer, thereupon an upper cladding layer and between said cladding layers a waveguide element. The influence of the substrate on the stress-induced birefringence of the optical waveguide device is reduced by modification of the substrate from underneath the waveguide element.
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