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公开(公告)号：CH632105A5
公开(公告)日：1982-09-15
申请号：CH21278
申请日：1978-01-10
Applicant: IBM
Inventor： RUPPRECHT HANS-STEPHEN , SCHWENKER ROBERT OTTO
IPC: H01L29/73 , G01Q70/00 , H01L21/265 , H01L21/3115 , H01L21/331 , H01L21/78 , H01L21/425 , H01L21/70
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