公开(公告)号：DE69417772D1

公开(公告)日：1999-05-12

申请号：DE69417772

申请日：1994-08-27

Applicant: IBM

Inventor： BINNIG GERD ,  HAEBERLE WALTER ,  ROHRER HEINRICH ,  SMITH DOUGLAS

IPC: G01B7/34 ,  G01B21/30 ,  G01Q10/04 ,  G05D3/00 ,  G11B5/55 ,  G11B9/00 ,  G11B21/02 ,  H02K33/18 ,  H02K41/035 ,  G01N27/00 ,  H02K57/00

Abstract: PCT No. PCT/EP94/02844 Sec. 371 Date Feb. 26, 1997 Sec. 102(e) Date Feb. 26, 1997 PCT Filed Aug. 27, 1994 PCT Pub. No. WO96/07074 PCT Pub. Date Mar. 7, 1996A fine-positioning apparatus for a scanning probe microscope includes magnetic solenoid actuators for each of the x, y and z scanning axes of the microscope. The sample is mounted on the coil of one of the actuators for movement of the sample in the z direction while the tunnelling probe is attached to two other solenoid actuators for movement of the probe in the x and y directions.

公开(公告)号：DE69417772T2

公开(公告)日：1999-12-02

申请号：DE69417772

申请日：1994-08-27

Applicant: IBM

Inventor： BINNIG GERD ,  HAEBERLE WALTER ,  ROHRER HEINRICH ,  SMITH DOUGLAS

IPC: G01B7/34 ,  G01B21/30 ,  G01Q10/04 ,  G05D3/00 ,  G11B5/55 ,  G11B9/00 ,  G11B21/02 ,  H02K33/18 ,  H02K41/035 ,  G01N27/00 ,  H02K57/00

Abstract: PCT No. PCT/EP94/02844 Sec. 371 Date Feb. 26, 1997 Sec. 102(e) Date Feb. 26, 1997 PCT Filed Aug. 27, 1994 PCT Pub. No. WO96/07074 PCT Pub. Date Mar. 7, 1996A fine-positioning apparatus for a scanning probe microscope includes magnetic solenoid actuators for each of the x, y and z scanning axes of the microscope. The sample is mounted on the coil of one of the actuators for movement of the sample in the z direction while the tunnelling probe is attached to two other solenoid actuators for movement of the probe in the x and y directions.