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公开(公告)号：DE69023932D1
公开(公告)日：1996-01-18
申请号：DE69023932
申请日：1990-01-11
Applicant: IBM
Inventor： SMITH THEOREN P , WOODALL JERRY M
IPC: H01L31/10 , H01L31/0352 , H01L31/101
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