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1.发明公开SERVO SYSTEM FOR A TWO-DIMENSIONAL MICRO-ELECTROMECHANICAL SYSTEM (MEMS)-BASED SCANNER AND METHOD THEREFOR 审中-公开电力SYSTEM FOR A ON二维微机电系统（MEMS）的扫描仪及其方法
公开(公告)号：EP1620846A4
公开(公告)日：2009-05-13
申请号：EP04749935
申请日：2004-04-09
Applicant: IBM
Inventor： SRI M SRI-JAYANTHA , DANG HIEN , SHARMA ARUN , ELEFTHERIOU EVANGELOS S , LANTZ MARK A , POZIDIS CHARALAMPOS
IPC: G05B1/06 , G05B19/18 , G11B20060101 , G11B7/085 , G11B7/09
CPC classification number: G11B7/0901 , G11B7/08505 , G11B7/0941
Abstract: A servo control system micro-electromechanical systems (MEMS)-based motion control system (and method therefor), includes a motion generator having an inherent stiffness component.
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2.发明申请SERVO SYSTEM FOR A TWO-DIMENSIONAL MICRO-ELECTROMECHANICAL SYSTEM (MEMS)-BASED SCANNER AND METHOD THEREFOR 审中-公开用于二维微机电系统（MEMS）的伺服系统 - 扫描仪及其方法
公开(公告)号：WO2004093061A3
公开(公告)日：2006-04-13
申请号：PCT/US2004010975
申请日：2004-04-09
Applicant: IBM
Inventor： SRI M SRI-JAYANTHA , DANG HIEN , SHARMA ARUN , ELEFTHERIOU EVANGELOS S , LANTZ MARK A , POZIDIS CHARALAMPOS
IPC: G05B19/18 , G11B20060101 , G11B7/085 , G11B7/09 , G05B1/06
CPC classification number: G11B7/0901 , G11B7/08505 , G11B7/0941
Abstract: A servo control system micro-electromechanical systems (MEMS)-based motion control system (and method therefor), includes a motion generator having an inherent stiffness component.
Abstract translation: 基于微机电系统（MEMS）的运动控制系统（及其方法）包括具有固有刚度分量的运动发生器。
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