公开(公告)号：US20150069225A1

公开(公告)日：2015-03-12

申请号：US14540743

申请日：2014-11-13

Applicant: Korea Research Institute of Standards and Science

Inventor： Jong-Ahn Kim ,  Jae-Wan Kim ,  Tae-Bong Eom ,  Chu-Shik Kang ,  Jong-Han JIN

IPC: G01D5/347

CPC classification number: G01D5/34707 ,  G01D5/2455 ,  G01D5/34746 ,  G01D5/34776 ,  G01D5/34792

Abstract: Provided are an absolute position measurement method, an absolute position measurement apparatus, and a scale. The scale includes a scale pattern formed by replacing repeatedly arranged pseudo-random-codes with a sequence of a linear feedback shift register of N stages using a first symbol with first width representing a first state and a second symbol with second width representing a second state. The first is divided into two or more first symbol areas of different structures, and the second symbol is divided into two or more second symbol areas of different structures. There is at least one overlap area in which the first symbol and the second symbol overlap each other to have the same structure.

Abstract translation: 提供绝对位置测量方法，绝对位置测量装置和刻度。 标度包括通过使用具有表示第一状态的第一宽度的第一符号和代表第二状态的第二宽度的第二符号将具有N级的线性反馈移位寄存器的序列的重复排列的伪随机码替换的比例模式 。 第一符号区域分为两个或更多个不同结构的第一符号区域，第二符号被划分为两个或更多个不同结构的第二符号区域。 存在至少一个重叠区域，其中第一符号和第二符号彼此重叠以具有相同的结构。

公开(公告)号：US20150012246A1

公开(公告)日：2015-01-08

申请号：US14323211

申请日：2014-07-03

Applicant: KOREA RESEARCH INSTITUTE OF STANDARDS AND SCIENCE

Inventor： Jae-Wan KIM ,  Jong-Ahn KIM ,  Chu-Shik KANG ,  Jong-Han JIN

IPC: G01B11/06

CPC classification number: G01B11/06 ,  G01B9/0201 ,  G01B9/02081 ,  G01B11/14 ,  G01N21/211 ,  G01N21/45 ,  G01N2021/213 ,  G01S17/36

Abstract: Provided are a thickness measuring apparatus and a thickness measuring method. The thickness measuring method includes irradiating first laser beam of a first wavelength λ1 to a transparent substrate and measuring intensity of first laser beam transmitting the transparent substrate; irradiating second laser beam of a second wavelength λ2 to the transparent substrate and measuring intensity of second laser beam transmitting the transparent substrate; and extracting a rotation angle on a Lissajous graph using the first and second laser beams transmitting the transparent substrate. A phase difference between adjacent rays by multiple internal reflection of the first laser beam and a phase difference between adjacent ray by multiple internal reflection of the second laser beam is maintained at π/2.

Abstract translation: 提供了一种厚度测量装置和厚度测量方法。 厚度测量方法包括将第一波长λ1的第一激光束照射到透明基板并测量透射透明基板的第一激光束的强度; 将第二波长λ2的第二激光束照射到透明基板并测量透射透明基板的第二激光束的强度; 以及使用透射所述透明基板的所述第一和第二激光束在利萨如图上提取旋转角度。 通过第一激光束的多次内部反射的相邻射线之间的相位差和通过第二激光束的多次内部反射的相邻射线之间的相位差保持在＆lt; pgr / 2。

公开(公告)号：US20150009509A1

公开(公告)日：2015-01-08

申请号：US14491589

申请日：2014-09-19

Applicant: Korea Research Institute of Standards and Science

Inventor： Jae-Wan KIM ,  Jong-Ahn KIM ,  Jong-Han JIN ,  Chu-Shik KANG ,  Tae-Bong EOM

IPC: G01B11/06

CPC classification number: G01B11/0691

Abstract: Provided are a transparent substrate monitoring apparatus and a transparent substrate monitoring method. The transparent substrate monitoring apparatus includes a light emitting unit emitting light; a double slit disposed on a plane defined in a first direction and a second direction intersecting a propagation direction of incident light and includes a first slit and a second slit spaced apart from each other in the first direction to allow the light to pass therethrough; an optical detection unit measuring an intensity profile or position of an interference pattern formed on a screen plane; and a signal processing unit receiving a signal from the optical detection unit to calculate an optical phase difference or an optical path difference.

Abstract translation: 提供透明基板监视装置和透明基板监视方法。 透明基板监视装置包括发光部的发光部; 设置在沿着与入射光的传播方向相交的第一方向和第二方向限定的平面上的双狭缝，并且包括在所述第一方向上彼此间隔开的第一狭缝和第二狭缝，以允许光通过; 光学检测单元，测量形成在屏幕平面上的干涉图案的强度分布或位置; 以及信号处理单元，接收来自光学检测单元的信号以计算光学相位差或光程差。