公开(公告)号：US20150012246A1

公开(公告)日：2015-01-08

申请号：US14323211

申请日：2014-07-03

Applicant: KOREA RESEARCH INSTITUTE OF STANDARDS AND SCIENCE

Inventor： Jae-Wan KIM ,  Jong-Ahn KIM ,  Chu-Shik KANG ,  Jong-Han JIN

IPC: G01B11/06

CPC classification number: G01B11/06 ,  G01B9/0201 ,  G01B9/02081 ,  G01B11/14 ,  G01N21/211 ,  G01N21/45 ,  G01N2021/213 ,  G01S17/36

Abstract: Provided are a thickness measuring apparatus and a thickness measuring method. The thickness measuring method includes irradiating first laser beam of a first wavelength λ1 to a transparent substrate and measuring intensity of first laser beam transmitting the transparent substrate; irradiating second laser beam of a second wavelength λ2 to the transparent substrate and measuring intensity of second laser beam transmitting the transparent substrate; and extracting a rotation angle on a Lissajous graph using the first and second laser beams transmitting the transparent substrate. A phase difference between adjacent rays by multiple internal reflection of the first laser beam and a phase difference between adjacent ray by multiple internal reflection of the second laser beam is maintained at π/2.

Abstract translation: 提供了一种厚度测量装置和厚度测量方法。 厚度测量方法包括将第一波长λ1的第一激光束照射到透明基板并测量透射透明基板的第一激光束的强度; 将第二波长λ2的第二激光束照射到透明基板并测量透射透明基板的第二激光束的强度; 以及使用透射所述透明基板的所述第一和第二激光束在利萨如图上提取旋转角度。 通过第一激光束的多次内部反射的相邻射线之间的相位差和通过第二激光束的多次内部反射的相邻射线之间的相位差保持在＆lt; pgr / 2。

公开(公告)号：US20150009509A1

公开(公告)日：2015-01-08

申请号：US14491589

申请日：2014-09-19

Applicant: Korea Research Institute of Standards and Science

Inventor： Jae-Wan KIM ,  Jong-Ahn KIM ,  Jong-Han JIN ,  Chu-Shik KANG ,  Tae-Bong EOM

IPC: G01B11/06

CPC classification number: G01B11/0691

Abstract: Provided are a transparent substrate monitoring apparatus and a transparent substrate monitoring method. The transparent substrate monitoring apparatus includes a light emitting unit emitting light; a double slit disposed on a plane defined in a first direction and a second direction intersecting a propagation direction of incident light and includes a first slit and a second slit spaced apart from each other in the first direction to allow the light to pass therethrough; an optical detection unit measuring an intensity profile or position of an interference pattern formed on a screen plane; and a signal processing unit receiving a signal from the optical detection unit to calculate an optical phase difference or an optical path difference.

Abstract translation: 提供透明基板监视装置和透明基板监视方法。 透明基板监视装置包括发光部的发光部; 设置在沿着与入射光的传播方向相交的第一方向和第二方向限定的平面上的双狭缝，并且包括在所述第一方向上彼此间隔开的第一狭缝和第二狭缝，以允许光通过; 光学检测单元，测量形成在屏幕平面上的干涉图案的强度分布或位置; 以及信号处理单元，接收来自光学检测单元的信号以计算光学相位差或光程差。