公开(公告)号：US20140313511A1

公开(公告)日：2014-10-23

申请号：US14322966

申请日：2014-07-03

Applicant: KOREA RESEARCH INSTITUTE OF STANDARDS AND SCIENCE

Inventor： Yong Jai CHO ,  Won CHE GAL ,  Hyun Mo CHO

IPC: G01N21/21 ,  G06F17/14

CPC classification number: G01N21/211 ,  G01N2021/213 ,  G06F17/141

Abstract: Provided is a real-time spectroscopic ellipsometer capable of obtaining information on properties of a sample, a nano pattern shape, and the like, in real time by measuring and analyzing, for a plurality of wavelengths, a change in a polarization state of incident light generated while being reflected or transmitted due to the sample when light having a specific polarization component is incident to the sample. The real-time spectroscopic ellipsometer according to the exemplary embodiment of the present invention have the improved structure and function to solve problems such as polarization dependency of a light source and a photometric detector, wavelength dependency of a compensator, a limitation of a change in integration time due to a fixing of a measuring frequency of exposure, in a rotating-element multichannel spectroscopic ellipsometers of the related art, thereby measuring more accurately, precisely, and rapidly measuring the characteristics of the sample than the related art.

Abstract translation: 提供了一种能够通过对多个波长测量和分析入射光的偏振态的变化来实时获得关于样品的性质，纳米图案形状等的信息的实时光谱椭偏仪 当具有特定偏振分量的光入射到样品时由于样品而被反射或透射时产生。 根据本发明的示例性实施例的实时光谱椭偏仪具有改进的结构和功能，以解决诸如光源和光度检测器的偏振依赖性，补偿器的波长依赖性，积分变化的限制 在相关技术的旋转元件多通道分光椭偏仪中由于固定测量曝光的时间而导致的时间，从而比现有技术更准确，精确地和快速地测量样品的特性。