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1.发明申请公开(公告)号：US20210181090A1
公开(公告)日：2021-06-17
申请号：US17256966
申请日：2019-07-03
Inventor： Yong Jai CHO , Won CHEGAL , Hyun Mo CHO
Abstract: The present invention relates to a normal incidence ellipsometer and a method for measuring the optical properties of a sample by using same. The purpose of the present invention is to provide: a normal incidence ellipsometer in which a wavelength-dependent compensator is replaced with a wavelength-independent linear polarizer such that equipment calibration procedures are simplified while a measurement wavelength range expansion can be easily implemented; and a method for measuring the optical properties of a sample by using same.
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Patent Agency Ranking
2.发明申请ROTATING-ELEMENT ELLIPSOMETER AND METHOD FOR MEASURING PROPERTIES OF THE SAMPLE USING THE SAME 审中-公开旋转元件ELLIPSOMETER及其测定样品性质的方法公开(公告)号：US20140313511A1
公开(公告)日：2014-10-23
申请号：US14322966
申请日：2014-07-03
Inventor： Yong Jai CHO , Won CHE GAL , Hyun Mo CHO
CPC classification number: G01N21/211 , G01N2021/213 , G06F17/141
Abstract: Provided is a real-time spectroscopic ellipsometer capable of obtaining information on properties of a sample, a nano pattern shape, and the like, in real time by measuring and analyzing, for a plurality of wavelengths, a change in a polarization state of incident light generated while being reflected or transmitted due to the sample when light having a specific polarization component is incident to the sample. The real-time spectroscopic ellipsometer according to the exemplary embodiment of the present invention have the improved structure and function to solve problems such as polarization dependency of a light source and a photometric detector, wavelength dependency of a compensator, a limitation of a change in integration time due to a fixing of a measuring frequency of exposure, in a rotating-element multichannel spectroscopic ellipsometers of the related art, thereby measuring more accurately, precisely, and rapidly measuring the characteristics of the sample than the related art.
Abstract translation: 提供了一种能够通过对多个波长测量和分析入射光的偏振态的变化来实时获得关于样品的性质，纳米图案形状等的信息的实时光谱椭偏仪 当具有特定偏振分量的光入射到样品时由于样品而被反射或透射时产生。 根据本发明的示例性实施例的实时光谱椭偏仪具有改进的结构和功能，以解决诸如光源和光度检测器的偏振依赖性，补偿器的波长依赖性，积分变化的限制 在相关技术的旋转元件多通道分光椭偏仪中由于固定测量曝光的时间而导致的时间，从而比现有技术更准确，精确地和快速地测量样品的特性。
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公开(公告)号：US20240337591A1
公开(公告)日：2024-10-10
申请号：US18604754
申请日：2024-03-14
Inventor： Dong Hyung KIM , Hyun Mo CHO
IPC: G01N21/21 , G01N21/552 , G01N21/84
CPC classification number: G01N21/211 , G01N21/554 , G01N21/8422 , G01N2021/213
Abstract: A split prism silicon-based immersion microchannel measuring device includes a microchannel structure including a support and one or more microchannels formed in the support and each having a sample detection layer with a fixed bioadhesive material for detecting a sample, a sample injection unit configured to inject a buffer solution containing the sample into the microchannel, a prism unit having a first prism and a second prism and formed by connecting a vertical surface of the first prism and a vertical surface of the second prism, a blocking part provided in a portion where the first prism and the second prism are connected to each other, the blocking part being configured to block an optical path, a polarized light generating unit configured to generate polarized light, and a polarized light detecting unit configured to detect a polarization change of reflected light.
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4.发明公开公开(公告)号：US20230168185A1
公开(公告)日：2023-06-01
申请号：US17921706
申请日：2020-09-21
Inventor： Hyun Mo CHO , Dong Hyung KIM , Won CHEGAL , Yong Jai CHO
CPC classification number: G01N21/211 , G01N21/11 , G01N2021/752
Abstract: An embodiment of the present disclosure provides a multi-reflection silicon-based liquid immersion micro-channel measurement device and measurement method capable of improving measurement sensitivity by completely separating, through multi-reflection, first reflective light reflected by a sample detection layer and a second reflective light by a prism-buffer solution interface and by allowing the light to enter multiple times through the multi-reflection. The multi-reflection silicon-based liquid immersion micro-channel measurement device according to the embodiment of the present disclosure includes a micro-channel structure including a support, and one or more micro-channels formed on the support and each having a sample detection layer with a fixed bioadhesive material for detecting a sample, a sample injection unit configured to inject a buffer solution containing the sample into the micro-channel, a prism unit including a prism, and a reflection structure formed by coating a bottom surface of the prism with a mirror reflection material, the polarized light generating unit configured to generate polarized light, and the polarized light detecting unit configured to detect a polarization change of reflected light.
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5.发明申请公开(公告)号：US20180113069A1
公开(公告)日：2018-04-26
申请号：US15557446
申请日：2016-03-08
Inventor： Yong Jai CHO , Won CHEGAL , Hyun Mo CHO
CPC classification number: G01N21/211 , G01B11/0641 , G01B11/24 , G01J4/04 , G01N21/8422
Abstract: The present invention relates to an optical element rotation type ellipsometer, and more particularly, to an ellipsometer used to measure Mueller-matrix components of a sample by measuring and analyzing a change in a polarization state of light reflected or transmitted by the sample.According to the exemplary embodiment of the present invention, it is possible to provide the achromatic rotating-element ellipsometer and the method for measuring Mueller-matrix elements of a sample using the same capable of measuring the Mueller-matrix elements of the anisotropic sample as well as the isotropic sample by using four polarizers.
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6.发明申请公开(公告)号：US20180100795A1
公开(公告)日：2018-04-12
申请号：US15532896
申请日：2016-04-27
Inventor： Hyun Mo CHO , Won CHEGAL , Yong Jai CHO
CPC classification number: G01N21/211 , B01L3/502715 , B01L2300/0654 , B01L2300/08 , B01L2300/0816 , B01L2300/168 , G01B11/06 , G01N21/21 , G01N21/4133 , G01N2021/213
Abstract: An oblique incidence, prism-incident, silicon-based, immersion microchannel-based measurement device related to an example of the present disclosure may include: a microchannel structure which has a support, a substrate which is formed on the support and made of a semiconductor or dielectric material, a cover part which has a prism structure and is installed on the support, and a microchannel which is formed in any one of an upper portion of the support and a lower end of the cover part; a sample injection part which forms an adsorption layer for a sample on a substrate by injecting a buffer solution containing the sample made of a biomaterial into the microchannel; a polarized light generation part which emits polarized incident light through an incident surface of the prism to the adsorption layer at an incident angle that satisfies a p-wave antireflection condition; and a polarized light detection part which first reflective light reflected by at least one of the adsorption layer and the substrate enters through a reflective surface of the prism and which detects a change in polarization of the first reflective light.
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