公开(公告)号：US20030226604A1

公开(公告)日：2003-12-11

申请号：US10440515

申请日：2003-05-16

Applicant: MICRONIT MICROFLUIDICS B.V.

Inventor： Stefan Schlautmann ,  Albert Van den Berg ,  Johannes Gerardus Elisabeth Gardeniers

IPC: F15C001/04

CPC classification number: B81C1/00119 ,  B01L3/502707 ,  B01L2200/10 ,  B01L2300/0874 ,  B01L2300/0883 ,  B01L2300/0887 ,  B01L2400/0418 ,  B81B2201/0214 ,  B81B2201/058 ,  B81B2203/0338 ,  B81C2201/0104 ,  G01N33/48707 ,  Y10T137/2191

Abstract: The present invention relates to a method of fabricating a microfluidic device including at least two substrates provided with a fluid channel, comprising the steps of: a) etching at least a channel and one or more fluid ports in a first and/or a second substrate; b) depositing a first layer on a surface of the second substrate; c) partially removing the first layer in accordance with a predefined geometry; d) depositing a second layer on top of the first layer and the substrate surface; e) planarizing the second layer so as to smooth the upper surface thereof; f) aligning the first and second substrate; g) bonding the first substrate on the planarized second layer of the second substrate.

Abstract translation: 本发明涉及一种制造微流体装置的方法，该微流体装置包括具有流体通道的至少两个基板，包括以下步骤：a）至少蚀刻第一和/或第二基板中的通道和一个或多个流体端口 ; b）在第二基板的表面上沉积第一层; c）根据预定几何部分去除第一层; d）在第一层和衬底表面的顶部上沉积第二层; e）平面化第二层以平滑其上表面; f）对准所述第一和第二基板; g）将第一衬底接合在第二衬底的平坦化的第二层上。