公开(公告)号：MY184622A

公开(公告)日：2021-04-09

申请号：MYPI2013702271

申请日：2013-11-26

Applicant: MIMOS BERHAD

Inventor： DANIEL BIEN CHIA SENG ,  MOHSEN NABIPOOR ,  TEH AUN SHIH ,  LEE WAI YEE ,  LEE HING WAH

Abstract: The present invention relates to a piezoresistive pressure sensor which detects applied pressure by measuring the change of electrical conductivity of the magnetic nanoparticles (3) in response to the application of mechanical stress onto the diaphragm (1). The pressure sensor comprises conductive electrodes (2) formed on the diaphragm (1) which is provided on a substrate (4). Magnetic nanoparticles (3) are deposited on the conductive electrodes (2) for electrically connecting the conductive electrodes (2) and changing electrical conductivity when stress is applied.