INKJET PRINTHEAD WITH ENCAPSULANT-RETAINING FEATURES

    公开(公告)号:WO2019211070A1

    公开(公告)日:2019-11-07

    申请号:PCT/EP2019/059174

    申请日:2019-04-11

    Abstract: A MEMS chip assembly including: a support structure having a chip mounting surface; a MEMS chip mounted on the chip mounting surface, each MEMS chip having an active surface including one or more MEMS devices and a plurality of bond pads disposed alongside a connection edge of the MEMS chip; electrical connectors connected to the bond pads; and an encapsulant material covering the electrical connectors. The MEMS chip has encapsulant-retaining trenches defined in the active surface extending alongside the connection edge, each encapsulant-retaining trench being disposed between the bond pads and the MEMS devices.

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