公开(公告)号：US20180038758A1

公开(公告)日：2018-02-08

申请号：US15723752

申请日：2017-10-03

Applicant: NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY

Inventor： Hajime YOSHIDA ,  Kenta ARAI ,  Tokihiko KOBATA

IPC: G01L27/00 ,  G01M3/00 ,  B81B7/00 ,  G01M3/20 ,  G01M3/26

CPC classification number: G01L27/002 ,  B81B7/0009 ,  B81B2201/05 ,  G01M3/007 ,  G01M3/207 ,  G01M3/26

Abstract: A static expansion method is performed by expanding a volume of a testing gas from V0 to V0+V1 between a second chamber of the volume V1 which is connected to an upstream side of a measurement chamber and a first chamber of the volume V0 which is connected to an upstream side of the second chamber, wherein the first camber is in communication with the second chamber via a first valve, wherein the second chamber is in communication with the measurement chamber via each of a second valve and an orifice or porous plug, respectively. When the first valve is opened and the second valve is closed, the testing gas flows from the first chamber via the second chamber into the measurement chamber only through the orifice or porous plug.

公开(公告)号：US20150323408A1

公开(公告)日：2015-11-12

申请号：US14443904

申请日：2013-11-12

Applicant: NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY

Inventor： Hajime YOSHIDA ,  Kenta ARAI ,  Tokihiko KOBATA

IPC: G01L27/00 ,  G01M3/26 ,  B81B7/00

CPC classification number: G01L27/002 ,  B81B7/0009 ,  B81B2201/05 ,  G01M3/007 ,  G01M3/207 ,  G01M3/26

Abstract: There is provided a reference leak generating device capable of precisely generating an ultra-fine reference leak. The reference leak generating device adapted to be connected to an upstream side of a measurement chamber includes a chamber connected to the measurement chamber through an orifice or a porous plug having a molecular flow conductance C and a pressure to establish molecular flow conditions which are known in advance, and is characterized in that a pressure p1 of testing gas to be introduced into the chamber is precisely determined by using a static expansion method once or more times, and a leak rate of a reference leak at the pressure p1 is obtained in accordance with a product of C and p1.

Abstract translation: 提供了能够精确地产生超细参考泄漏的参考泄漏产生装置。 适于连接到测量室的上游侧的参考泄漏产生装置包括通过具有分子流导度C和压力的孔口或多孔塞连接到测量室的室，以建立分子流动条件 并且其特征在于，通过使用静态膨胀法一次或多次精确地确定要引入到室中的测试气体的压力p1，并且根据压力p1获得压力p1处的基准泄漏的泄漏率 C和p1的产物。