公开(公告)号：WO1993008445A1

公开(公告)日：1993-04-29

申请号：PCT/US1992008908

申请日：1992-10-19

Applicant: PHASE METRICS

Inventor： PHASE METRICS ,  LACEY, Christopher

IPC: G01B09/02

CPC classification number: G11B5/54 ,  G01B11/14 ,  G11B21/12 ,  G11B21/21 ,  G11B33/10

Abstract: The apparatus and method for measuring a small spacing down to contact uses an interferometric fringe intensity calibration to calibrate maximum and minimum intensity of two or more monochromatic or quasi-monochromatic interference patterns caused by a spacing between two articles (10, 12), one of which is transparent (10). The intensity calibration is done by measuring maximum and minimum fringe intensity of each color (2) while altering the spacing (51) by at least 1/4 of the wavelength of the light or other electromagnetic radiation being used. The calibration by changing spacing allows the fringe order to be calculated (26) for each wavelength of the radiation being used. This calibration procedure allows the maximum and minimum intensity of the radiation to be known, as well as the fringe order of the interference patterns to be calculated. With the maximum and minimum intensities and the fringe orders known, the spacing is readily calculated from interferometric theory.

公开(公告)号：WO1995017646A1

公开(公告)日：1995-06-29

申请号：PCT/US1994014676

申请日：1994-12-14

Applicant: PHASE METRICS

Inventor： PHASE METRICS ,  LACEY, Christopher ,  ROSS, Edward, W.

IPC: G01C09/02

CPC classification number: G11B21/12 ,  G01B11/14 ,  G11B21/21 ,  G11B33/10

Abstract: The apparatus and method for measuring a small spacing down to contact uses interferometric fringe intensity calibration to calibrate maximum and minimum intensity of two or more monochromatic of quasi-monochromatic interference patterns caused by a spacing between two articles (10, 12), one of which is transparent (10). The intensity calibration is done by measuring maximum and minimum fringe intensity of each color (81, 82) while altering the spacing by at least 1/4 of the wavelength of the light or other electromagnetic radiation being used. The calibration by changing spacing allows the fringe order to be calculated for each wavelength of the radiation being used. This calibration procedure allows the maximum and minimum intensity of the radiation to be known, as well as the fringe order of the interference patterns to be calculated. With the maximum and minimum intensities and the fringe orders known, the spacing is readily calculated from the interferometric theory.

Abstract translation: 用于测量向下接触的小间距的装置和方法使用干涉条纹强度校准来校准由两个物品（10,12）之间的间隔引起的两个或更多个单色的准单色干涉图案的最大和最小强度，其中之一 是透明的（10）。 通过测量每种颜色（81,82）的最大和最小条纹强度，同时将间距改变为所使用的光或其他电磁辐射的至少1/4波长来进行强度校准。 通过改变间隔的校准允许针对所使用的辐射的每个波长计算条纹顺序。 该校准程序允许了解辐射的最大和最小强度以及要计算的干涉图案的边缘顺序。 利用已知的最大和最小强度和边缘级，可以从干涉测量理论中容易地计算间距。

公开(公告)号：EP0689665A1

公开(公告)日：1996-01-03

申请号：EP95906029.0

申请日：1994-12-14

Applicant: PHASE METRICS

Inventor： LACEY, Christopher ,  ROSS, Edward, W.

IPC: G01B9 ,  G01B11 ,  G11B5 ,  G11B21 ,  G11B33

CPC classification number: G11B21/12 ,  G01B11/14 ,  G11B21/21 ,  G11B33/10

Abstract: The apparatus and method for measuring a small spacing down to contact uses interferometric fringe intensity calibration to calibrate maximum and minimum intensity of two or more monochromatic of quasi-monochromatic interference patterns caused by a spacing between two articles (10, 12), one of which is transparent (10). The intensity calibration is done by measuring maximum and minimum fringe intensity of each color (81, 82) while altering the spacing by at least 1/4 of the wavelength of the light or other electromagnetic radiation being used. The calibration by changing spacing allows the fringe order to be calculated for each wavelength of the radiation being used. This calibration procedure allows the maximum and minimum intensity of the radiation to be known, as well as the fringe order of the interference patterns to be calculated. With the maximum and minimum intensities and the fringe orders known, the spacing is readily calculated from the interferometric theory.

公开(公告)号：EP0722557A1

公开(公告)日：1996-07-24

申请号：EP92922814.0

申请日：1992-10-19

Applicant: PHASE METRICS

Inventor： LACEY, Christopher

IPC: G01B9 ,  G01B11 ,  G11B5 ,  G11B21 ,  G11B33

CPC classification number: G11B5/54 ,  G01B11/14 ,  G11B21/12 ,  G11B21/21 ,  G11B33/10

Abstract: The apparatus and method for measuring a small spacing down to contact uses an interferometric fringe intensity calibration to calibrate maximum and minimum intensity of two or more monochromatic or quasi-monochromatic interference patterns caused by a spacing between two articles (10, 12), one of which is transparent (10). The intensity calibration is done by measuring maximum and minimum fringe intensity of each color (2) while altering the spacing (51) by at least 1/4 of the wavelength of the light or other electromagnetic radiation being used. The calibration by changing spacing allows the fringe order to be calculated (26) for each wavelength of the radiation being used. This calibration procedure allows the maximum and minimum intensity of the radiation to be known, as well as the fringe order of the interference patterns to be calculated. With the maximum and minimum intensities and the fringe orders known, the spacing is readily calculated from interferometric theory.