PRESSURE SENSOR
    1.
    发明公开
    PRESSURE SENSOR 审中-公开

    公开(公告)号:EP4067854A3

    公开(公告)日:2023-01-04

    申请号:EP22165418.9

    申请日:2022-03-30

    Abstract: A pressure sensor includes a housing (20), an isolator (26) positioned at a first end (22) of the housing, and a first cavity (28) formed between the first end of the housing and the isolator. The pressure sensor further includes a second cavity (42) formed in the housing and a channel (48) with a first end (50) fluidly connected to the first cavity and a second end (52) fluidly coupled to the second cavity. A pressure sensor chip (62) is positioned in the second cavity and includes a first diaphragm (68) positioned at a top side of the pressure sensor chip laterally outwards from the second end of the channel.

    PRESSURE SENSOR
    2.
    发明公开
    PRESSURE SENSOR 审中-公开

    公开(公告)号:EP4067854A2

    公开(公告)日:2022-10-05

    申请号:EP22165418.9

    申请日:2022-03-30

    Abstract: A pressure sensor includes a housing (20), an isolator (26) positioned at a first end (22) of the housing, and a first cavity (28) formed between the first end of the housing and the isolator. The pressure sensor further includes a second cavity (42) formed in the housing and a channel (48) with a first end (50) fluidly connected to the first cavity and a second end (52) fluidly coupled to the second cavity. A pressure sensor chip (62) is positioned in the second cavity and includes a first diaphragm (68) positioned at a top side of the pressure sensor chip laterally outwards from the second end of the channel.

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