Abstract:
PROBLEM TO BE SOLVED: To provide a pressure sensor which displays that there is a reference pressure in a sealed chamber on one principal plane of a diaphragm part. SOLUTION: A cap member 82 is fixed for sealing on one principal plane of a diaphragm part 79 to form a sealed chamber between them and presence of reference pressure is easily discriminated by deflecting the cup member 82 to inner direction when the sealed chamber is in reference pressure (vacuum). A diaphragm assembly 77 is fix on a fitting plane through a stress separation layer 71 and whereby transmission of distortion from the fitting plane is reduced and measuring error is reduced.
Abstract:
A pressure transducer has a stress isolator layer which permits the sensor to be non-resiliently mounted (hard mounted) to a mounting surface that in turn is subjected to strain. The strain of the mounting surface tends to induce undesired stress in the sensing diaphragm, and the present stress isolator layer minimizes the amount of stress that is transferred to the measuring diaphragm, to thereby reduce error. The spring preferably comprises a silicon leaf-type spring, with or without isolating slots, and is used in various combinations of diaphragms that are sensitive to pressure. The deflection of the diaphragm in response to pressure can be measured in any desired known manner such as with strain gage resistors, or through capacitive sensing.
Abstract:
A pressure transducer has a stress isolator layer (18) which permits the sensor (25) to be non-resiliently mounted (hard mounted) to a mounting surface (26) that in turn is subjected to strain. The strain of the mounting surface (26) tends to induce undesired stress in the sensing diaphragm (25) and the present stress isolator layer (18) minimizes the amount of stress that is transferred to the sensing diaphragm (25) to thereby reduce error. The spring (17) preferably comprises a silicon leaf-type spring (17) with or without isolating slots and is used in various combinations of diaphragms that are sensitive to pressure. The deflection of the diaphragm in response to pressure can be measured in any desired known manner such as with strain gauge resistors (32) or through capacitive sensing.