Abstract:
PROBLEM TO BE SOLVED: To provide various semiconductor processing components, and a method for forming the same. SOLUTION: This semiconductor processing component is formed of SiC, and an outer surface portion of the semiconductor processing component has a surface impurity level that is not greater than 10 times an internal impurity level. This method for treating a semiconductor processing component includes exposing the semiconductor processing component to a halogen gas at an elevated temperature, oxidizing the semiconductor processing component to form an oxide layer, and removing the oxide layer. COPYRIGHT: (C)2010,JPO&INPIT
Abstract:
A sintered ceramic component can have a final composition including at least 50 wt. % MgO and at least one desired dopant, wherein each dopant of the at least one desired dopant has a desired dopant content of at least 0.1 wt. %. All impurities (not including the desired dopant(s)) are present at a combined impurity content of less than 0.7 wt. %. A remainder can include Al2O3. The selection of dopants can allow for better control over the visual appearance of the sintered ceramic component, reduces the presence of undesired impurities that may adversely affect another part of an apparatus, or both. The addition of the dopant(s) can help to improve the sintering characteristics and density as compared to a sintered ceramic component that includes the material with no dopant and a relatively low impurity content.
Abstract:
A glass-ceramic seal for ionic transport devices such as solid oxide fuel cell stacks or oxygen transport membrane applications. Preferred embodiments of the present invention comprise glass-ceramic sealant material based on a Barium-Aluminum-Silica system, which exhibits a high enough coefficient of thermal expansion to closely match the overall CTE of a SOFC cell/stack (preferably from about 11 to 12.8 ppm/° C.), good sintering behavior, and a very low residual glass phase (which contributes to the stability of the seal).