公开(公告)号：NO982667D0

公开(公告)日：1998-06-10

申请号：NO982667

申请日：1998-06-10

Applicant: SEXTANT AVIONIQUE

Inventor： LEFORT OLIVIER ,  PEDRAZA-RAMOS SYLVIE ,  PRESSET RENU ,  GIROUD PIERRE

IPC: G01P15/08 ,  G01P15/12 ,  G01P15/13 ,  G01P15/18 ,  H01L29/84 ,  G01P

Abstract: PCT No. PCT/FR96/01968 Sec. 371 Date Jul. 30, 1998 Sec. 102(e) Date Jul. 30, 1998 PCT Filed Dec. 10, 1996 PCT Pub. No. WO97/22010 PCT Pub. Date Jun. 19, 1997An accelerometer based on monocrystalline silicon. A moving mass is connected to a fixed frame by suspension arms. The sensor is produced in the stack of two silicon wafers in which stop and counter-stop functions are produced so as to limit the amplitude of the movements of the moving mass.

公开(公告)号：NO982667L

公开(公告)日：1998-08-11

申请号：NO982667

申请日：1998-06-10

Applicant: SEXTANT AVIONIQUE

Inventor： LEFORT OLIVIER ,  PEDRAZA-RAMOS SYLVIE ,  PRESSET RENU ,  GIROUD PIERRE

IPC: G01P15/08 ,  G01P15/12 ,  G01P15/13 ,  G01P15/18 ,  H01L29/84

Abstract: PCT No. PCT/FR96/01968 Sec. 371 Date Jul. 30, 1998 Sec. 102(e) Date Jul. 30, 1998 PCT Filed Dec. 10, 1996 PCT Pub. No. WO97/22010 PCT Pub. Date Jun. 19, 1997An accelerometer based on monocrystalline silicon. A moving mass is connected to a fixed frame by suspension arms. The sensor is produced in the stack of two silicon wafers in which stop and counter-stop functions are produced so as to limit the amplitude of the movements of the moving mass.

公开(公告)号：NO982667A

公开(公告)日：1998-08-11

申请号：NO982667

申请日：1998-06-10

Applicant: SEXTANT AVIONIQUE

Inventor： LEFORT OLIVIER ,  PEDRAZA-RAMOS SYLVIE ,  PRESSET RENU ,  GIROUD PIERRE

IPC: G01P15/08 ,  G01P15/12 ,  G01P15/13 ,  G01P15/18 ,  H01L29/84

CPC classification number: G01P15/123 ,  G01P15/0802 ,  G01P15/132 ,  G01P2015/084