公开(公告)号：EP3712660A1

公开(公告)日：2020-09-23

申请号：EP20159897.6

申请日：2020-02-27

Applicant: STMicroelectronics S.r.l.

Inventor： CARMINATI, Roberto ,  BOTTINELLI, Fabio

IPC: G01S17/89 ,  G01S7/481 ,  G01S17/42

Abstract: An electronic module (2; 40; 50; 60), comprising: a substrate (2a); a covering structure (2b), coupled to the substrate to form a chamber (4). The chamber houses: an emitter (12) adapted to emit a radiation (18); a resonant reflector (10); a detector (22); and a fixed reflector (16). First and second windows (20, 26) extend through the covering structure (2b). The emitter (12), the first reflector (10) and the second reflector (16) are reciprocally arranged such that the emitted radiation generated by the emitter is received by the fixed reflector (16), is reflected towards the MEMS reflector (10), and then is reflected towards the first window, to form an output of the electronic module. The detector (22) and the second window (26) are reciprocally arranged such that an incoming radiation (24) passing through the second window (26) is received by the detector. The electronic module can be used for 3D sensing application.