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    OSCILLATING STRUCTURE WITH PIEZOELECTRIC ACTUATION, SYSTEM AND MANUFACTURING METHOD
    3.
    发明公开
    OSCILLATING STRUCTURE WITH PIEZOELECTRIC ACTUATION, SYSTEM AND MANUFACTURING METHOD 审中-公开
    压电驱动的振荡结构，系统和制造方法

    公开(公告)号：EP3276391A1

    公开(公告)日：2018-01-31

    申请号：EP17162612.0

    申请日：2017-03-23

    Applicant: STMicroelectronics S.r.l.

    Inventor： CARMINATI, Roberto ,  MERLI, Massimiliano ,  CONTI, Sebastiano

    IPC: G02B26/08

    CPC classification number: G02B26/0858 ,  G03B21/008 ,  H01L41/053 ,  H01L41/332

    Abstract: An oscillating structure (30) with piezoelectric actuation, comprising: a first torsional elastic element (56) and a second torsional elastic element (58) constrained to respective portions of a fixed supporting body (40) and defining an axis of rotation (O); a mobile element (55, 57, 60) set between, and connected to, the first and second torsional elastic elements (56, 58), the mobile element being rotatable about the axis of rotation (O) as a consequence of a torsion of the first and second deformable elements; and a first control region (66), which is coupled to the mobile element (55, 57, 60) and houses a first piezoelectric actuator (70) configured to cause, in use, a local deformation of the first control region (66) that generates a torsion of the first and second torsional elastic elements (56, 58).

    Abstract translation: 1。一种具有压电致动的摆动结构（30），包括：第一扭转弹性元件（56）和第二扭转弹性元件（58），所述第一扭转弹性元件和第二扭转弹性元件被约束至固定支撑体（40）的相应部分并限定旋转轴线（O） ; 设置在所述第一和第二扭转弹性元件（56,58）之间并连接到所述第一和第二扭转弹性元件（56,58）之间的可移动元件（55,57,60），所述可移动元件能够围绕所述旋转轴线（O）旋转，作为 第一和第二可变形元件; 和第一控制区域（66），所述第一控制区域联接到所述可移动元件（55,57,60）并容纳第一压电致动器（70），所述第一压电致动器（70）被配置为在使用时导致所述第一控制区域（66） 产生第一和第二扭转弹性元件（56,58）的扭转。

    MEMS MIRROR DEVICE WITH PIEZOELECTRIC ACTUATION AND MANUFACTURING PROCESS THEREOF
    4.
    发明公开
    MEMS MIRROR DEVICE WITH PIEZOELECTRIC ACTUATION AND MANUFACTURING PROCESS THEREOF 审中-公开

    公开(公告)号：EP4310573A1

    公开(公告)日：2024-01-24

    申请号：EP23183016.7

    申请日：2023-07-03

    Applicant: STMicroelectronics S.r.l.

    Inventor： MERLI, Massimiliano ,  CARMINATI, Roberto ,  BONI, Nicolò ,  COSTANTINI, Sonia ,  PRELINI, Carlo Luigi

    IPC: G02B26/08

    Abstract: Micro-electro-mechanical mirror device (1) having a fixed structure (2) defining an external frame (2') which delimits a cavity (3); a tiltable structure (4) extending into the cavity; a reflecting surface (4') carried by the tiltable structure and having a main extension in a horizontal plane (XY); an actuation structure (10), coupled between the tiltable structure (4) and the fixed structure (2). The actuation structure (10) is formed by at least one first pair of actuation arms (12A, 12B) configured to cause the rotation of the tiltable structure (2) around a first rotation axis (SA) parallel to the horizontal plane (XY). The actuation arms of the first pair of actuation arms (12A, 12B) are elastically coupled to the tiltable structure (4) through respective coupling elastic elements (14A, 14B) and are each formed by a bearing structure (15) and by a piezoelectric structure (13). The bearing structure (15) of each actuation arm of the first pair of actuation arms (12A, 12B) is formed by a soft region (56) of a first material and the coupling elastic elements (14A, 14B) are formed by a bearing layer (103) of a second material, the second material having greater stiffness than the first material.

    MICROELECTROMECHANICAL DEVICE HAVING A STRUCTURE TILTABLE BY PIEZOELECTRIC ACTUATION ABOUT TWO ROTATION AXES
    5.
    发明公开
    MICROELECTROMECHANICAL DEVICE HAVING A STRUCTURE TILTABLE BY PIEZOELECTRIC ACTUATION ABOUT TWO ROTATION AXES 审中-公开

    公开(公告)号：EP3974890A1

    公开(公告)日：2022-03-30

    申请号：EP21199380.3

    申请日：2021-09-28

    Applicant: STMicroelectronics S.r.l.

    Inventor： BONI, Nicolò ,  CARMINATI, Roberto ,  MERLI, Massimiliano

    IPC: G02B26/08 ,  B81B3/00

    Abstract: A microelectromechanical device (10) has: a fixed structure (14) having a frame (14') defining a cavity (13); a tiltable structure (12) elastically suspended above the cavity with main extension in a horizontal plane (xy); a piezoelectrically driven actuation structure (22), which can be biased to cause a desired rotation of the tiltable structure about a first rotation axis (Al) and a second rotation axis (A2); and a supporting structure (15) integral with the fixed structure and extending in the cavity starting from the frame. Lever elements (16) are elastically coupled to the tiltable structure at a first end by respective elastic suspension elements (18) and to the supporting structure at a second end by elastic connecting elements (20), of a torsional type, which define a lever rotation axis (L); the lever elements are elastically coupled to the actuation structure so that their biasing causes, as a result of their rotation about the lever rotation axis, the desired rotation of the tiltable structure about the first and second rotation axes.

    RESONANT MEMS DEVICE HAVING A TILTABLE, PIEZOELECTRICALLY CONTROLLED STRUCTURE, IN PARTICULAR A MICROMIRROR
    6.
    发明公开
    RESONANT MEMS DEVICE HAVING A TILTABLE, PIEZOELECTRICALLY CONTROLLED STRUCTURE, IN PARTICULAR A MICROMIRROR 审中-公开

    公开(公告)号：EP3715317A1

    公开(公告)日：2020-09-30

    申请号：EP20166471.1

    申请日：2020-03-27

    Applicant: STMicroelectronics S.r.l.

    Inventor： CARMINATI, Roberto ,  BONI, Nicolò ,  MERLI, Massimiliano

    IPC: B81B3/00 ,  H02N2/00

    Abstract: A MEMS device (20) formed in a die of semiconductor material (24) defining a cavity (23) and having an anchorage portion (24'); a tiltable structure (22) elastically suspended over the cavity (23) and having a main extension in a horizontal plane (XY); a first and a second supporting arm (25A, 25B), extending between the anchorage portion and opposite sides of the tiltable structure; and a first and a second resonant piezoelectric actuation structure (30A1, 30A2), intended to be biased and cause rotation of the tiltable structure (22) about a rotation axis (A). The first supporting arm is formed by a first and a second torsion spring (27A, 28A), which are rigid to movements out of the horizontal plane (XY) and compliant to torsion about the rotation axis and are coupled together at a constraint region (29A). The first and the second resonant piezoelectric actuation structures (38A1, 38A2) extend between the anchorage portion and the constraint region (29A), on a first and a second side, respectively, of the first supporting arm (25A).

    BIAXIAL RESONANT MICROELECTROMECHANICAL MIRROR STRUCTURE WITH PIEZOELECTRIC ACTUATION HAVING IMPROVED CHARACTERISTICS
    7.
    发明公开
    BIAXIAL RESONANT MICROELECTROMECHANICAL MIRROR STRUCTURE WITH PIEZOELECTRIC ACTUATION HAVING IMPROVED CHARACTERISTICS 审中-公开

    公开(公告)号：EP3712676A1

    公开(公告)日：2020-09-23

    申请号：EP20159965.1

    申请日：2020-02-28

    Applicant: STMicroelectronics S.r.l.

    Inventor： BONI, Nicolò ,  CARMINATI, Roberto ,  MERLI, Massimiliano

    IPC: G02B26/08 ,  G02B26/10

    Abstract: A microelectromechanical structure (10) has: a body of semiconductor material having a fixed frame (11) internally defining a cavity (12); a mobile mass (14) elastically suspended in the cavity and movable with a first resonant movement of rotation about a first rotation axis (R1) and with a second resonant movement of rotation about a second rotation axis (R2), orthogonal to the first rotation axis (R1); a first (16a, 16b) and a second pair (16c, 16d) of supporting elements, which extend in a cantilever fashion in the cavity, are rigidly coupled to the frame, and can be deformed by piezoelectric effect to cause rotation of the mobile mass about the first rotation axis and the second rotation axis; and a first (30a, 30b) and a second (30c, 30d) pair of elastic-coupling elements, elastically coupled between the mobile mass and the first and the second pairs of supporting elements; the first and second movements of rotation of the mobile mass are decoupled from one another and do not interfere with one another due to the elastic-coupling elements of the first and the second pairs.

    MICROELECTROMECHANICAL MIRROR DEVICE WITH PIEZOELECTRIC ACTUATION AND IMPROVED OPENING ANGLE
    9.
    发明公开
    MICROELECTROMECHANICAL MIRROR DEVICE WITH PIEZOELECTRIC ACTUATION AND IMPROVED OPENING ANGLE 审中-公开

    公开(公告)号：EP4082962A1

    公开(公告)日：2022-11-02

    申请号：EP22169585.1

    申请日：2022-04-22

    Applicant: STMicroelectronics S.r.l.

    Inventor： BONI, Nicolo' ,  CARMINATI, Roberto ,  MERLI, Massimiliano

    IPC: B81B3/00 ,  G02B26/08

    Abstract: A microelectromechanical mirror device (1) is provided with: a fixed structure (4) defining a cavity (3); a tiltable structure (2) carrying a reflecting surface (2'), elastically suspended above the cavity and having a main extension in a horizontal plane (xy); a first pair of driving arms (12a, 12b), carrying respective piezoelectric material regions (13) designed to be biased to cause a rotation of the tiltable structure around at least one first rotation axis (X) parallel to a first horizontal axis (x) of the horizontal plane, elastically coupled to the tiltable structure; and elastic suspension elements (6a, 6b), which couple the tiltable structure to the fixed structure at the first rotation axis, stiff with respect to movements out of the horizontal plane and yielding with respect to torsion around the first rotation axis, extending between the tiltable structure and the fixed structure. The elastic suspension elements comprise a first and a second elastic suspension element, wherein a first torsional stiffness of the first elastic suspension element is different from a second torsional stiffness of the second elastic suspension element.

    INTEGRATED ELECTRONIC MODULE FOR 3D SENSING APPLICATIONS, AND 3D SCANNING DEVICE INCLUDING THE INTEGRATED ELECTRONIC MODULE
    10.
    发明公开
    INTEGRATED ELECTRONIC MODULE FOR 3D SENSING APPLICATIONS, AND 3D SCANNING DEVICE INCLUDING THE INTEGRATED ELECTRONIC MODULE 审中-公开

    公开(公告)号：EP3712660A1

    公开(公告)日：2020-09-23

    申请号：EP20159897.6

    申请日：2020-02-27

    Applicant: STMicroelectronics S.r.l.

    Inventor： CARMINATI, Roberto ,  BOTTINELLI, Fabio

    IPC: G01S17/89 ,  G01S7/481 ,  G01S17/42

    Abstract: An electronic module (2; 40; 50; 60), comprising: a substrate (2a); a covering structure (2b), coupled to the substrate to form a chamber (4). The chamber houses: an emitter (12) adapted to emit a radiation (18); a resonant reflector (10); a detector (22); and a fixed reflector (16). First and second windows (20, 26) extend through the covering structure (2b). The emitter (12), the first reflector (10) and the second reflector (16) are reciprocally arranged such that the emitted radiation generated by the emitter is received by the fixed reflector (16), is reflected towards the MEMS reflector (10), and then is reflected towards the first window, to form an output of the electronic module. The detector (22) and the second window (26) are reciprocally arranged such that an incoming radiation (24) passing through the second window (26) is received by the detector. The electronic module can be used for 3D sensing application.

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