公开(公告)号：EP3107202B1

公开(公告)日：2018-06-13

申请号：EP15200411.5

申请日：2015-12-16

Applicant: STMicroelectronics S.r.l.

Inventor： PROCOPIO, Francesco ,  FRANGI, Attilio

IPC: H02N2/18 ,  H01L41/113

CPC classification number: H02N2/186 ,  H01L41/1136 ,  H02N2/181

Abstract: A piezoelectric transducer includes: an anchorage (16a); a beam (25) of semiconductor material, extending in cantilever fashion from the anchorage (16a) in a main direction parallel to a first axis (Y) and having a face (25c) parallel to a first plane (XY) defined by the first axis (Y) and by a second axis (X) perpendicular to the first axis (Y); and a piezoelectric layer (26) on the face (25c) of the beam (25). A cross-section of the beam (25; 125; 225; 325) perpendicular to the first axis (Y) is asymmetrical and is shaped so that the beam (25) presents deformations out of the first plane (XY) in response to forces applied to the anchorage (16) and oriented according to the first axis (X).

公开(公告)号：EP4223691A1

公开(公告)日：2023-08-09

申请号：EP23153332.4

申请日：2023-01-25

Applicant: STMicroelectronics S.r.l.

Inventor： OPRENI, Andrea ,  ZEGA, Valentina ,  FRANGI, Attilio ,  GATTERE, Gabriele ,  RIANI, Manuel

IPC: B81B3/00

Abstract: MEMS actuator (20) including: a substrate (21); a first and a second semiconductive layer (31,32); a frame (27) including transverse regions (62) formed by the second semiconductive layer (32), elongated parallel to a first direction (X) and offset along a second direction (Y), the frame (27) being movable parallel to the second direction (Y). The MEMS actuator (20) includes, for each transverse region (62): corresponding front rotor regions (65), which are fixed to the transverse region (62) and are suspended above the substrate (21); a first and a second stator region (70,72), which are formed by the first semiconductive layer (31) in such a way that, when the frame (27) is in rest position, the transverse region (62) is laterally offset with respect to the first and the second stator regions (70,72) and a first front rotor region (65') partially faces the first stator region (70), and in such a way that, during a translation of the frame (27) along the second direction (Y), the first and/or a second front rotor region (65', 65") at least partially face the second stator region (72), when the transverse region (62) begins to superimpose on the first stator region (70).

公开(公告)号：EP4152010A1

公开(公告)日：2023-03-22

申请号：EP22195322.7

申请日：2022-09-13

Applicant: STMicroelectronics S.r.l.

Inventor： ZEGA, Valentina ,  GATTERE, Gabriele ,  FRANGI, Attilio ,  OPRENI, Andrea ,  RIANI, Manuel

IPC: G01P15/097 ,  G01P15/08

Abstract: A detection structure (1) for a vertical-axis resonant accelerometer (32) is provided with: an inertial mass (2), suspended above a substrate (8) and having a window (5) provided therewithin and traversing it throughout a thickness thereof, the inertial mass (2) being coupled to a main anchorage (4), arranged in the window and integral with the substrate, through a first and a second anchoring elastic element (6a, 6b) of a torsional type and defining a rotation axis (A) of the inertial mass, such that they allow the inertial mass an inertial movement of rotation in response to an external acceleration (a ext ) acting along a vertical axis (z); and at least a first resonator element (10a), having longitudinal extension, coupled between the first elastic element and a first constraint element (12a) arranged in the window. The first constraint element is suspended above the substrate, to which it is fixedly coupled through a first auxiliary anchoring element (14a) which extends below the first resonator element with longitudinal extension and is integrally coupled between the first constraint element and the main anchorage (4).

公开(公告)号：EP4202919A1

公开(公告)日：2023-06-28

申请号：EP22211612.1

申请日：2022-12-06

Applicant: STMicroelectronics S.r.l.

Inventor： ZEGA, Valentina ,  FALORNI, Luca Giuseppe ,  FRANGI, Attilio ,  GAZZOLA, Chiara

IPC: G10K11/24

Abstract: A MEMS based device (100) includes a phononic crystal body (130) formed from unit cells (131) and having a defect line (141) extending through the phononic crystal body. Unit cells inside of the defect line (141) lack a same phononic bandgap as the unit cells outside of the defect line. An input MEMS resonator (110) is mechanically coupled to a first end of the defect line, and an output MEMS resonator (150) is mechanically coupled to a second end of the defect line. Each of the unit cells (131) outside of the defect line has an identical geometry. The input MEMS resonator (110) and output MEMS resonator (150) each have a natural frequency within the same phononic bandgap possessed by the unit cells (131) outside of the defect line. There may be more than one defect line, and in such cases, the MEMS device may include more than one input MEMS resonator and/or more than one output MEMS resonator.

公开(公告)号：EP3107202A1

公开(公告)日：2016-12-21

申请号：EP15200411.5

申请日：2015-12-16

Applicant: STMicroelectronics S.r.l.

Inventor： PROCOPIO, Francesco ,  FRANGI, Attilio

IPC: H02N2/18 ,  H01L41/113

CPC classification number: H02N2/186 ,  H01L41/1136 ,  H02N2/181

Abstract: A piezoelectric transducer includes: an anchorage (16a); a beam (25) of semiconductor material, extending in cantilever fashion from the anchorage (16a) in a main direction parallel to a first axis (Y) and having a face (25c) parallel to a first plane (XY) defined by the first axis (Y) and by a second axis (X) perpendicular to the first axis (Y); and a piezoelectric layer (26) on the face (25c) of the beam (25). A cross-section of the beam (25; 125; 225; 325) perpendicular to the first axis (Y) is asymmetrical and is shaped so that the beam (25) presents deformations out of the first plane (XY) in response to forces applied to the anchorage (16) and oriented according to the first axis (X).

Abstract translation: 压电换能器包括：锚固件（16a）; 半导体材料的梁（25），其在与第一轴线（Y）平行的主方向上从锚固件（16a）以悬臂的方式延伸并且具有平行于由第一轴线（Y）限定的第一平面（XY）的面（25c） （Y）和垂直于第一轴线（Y）的第二轴线（X）; 以及在所述梁（25）的所述面（25c）上的压电层（26）。 垂直于第一轴线（Y）的梁（25; 125; 225; 325）的横截面是不对称的并且被成形为使得梁（25）响应于力而呈现出第一平面（XY）之外的变形 施加到锚固件（16）并根据第一轴线（X）定向。