公开(公告)号：EP4361560A1

公开(公告)日：2024-05-01

申请号：EP23202344.0

申请日：2023-10-09

Applicant: STMicroelectronics S.r.l.

Inventor： CARULLI, Paola ,  FALORNI, Luca Giuseppe ,  FEDELI, Patrick ,  GUERINONI, Luca

IPC: G01C19/5762 ,  G01C19/5747

CPC classification number: G01C19/5762 ,  G01C19/5747

Abstract: A microelectromechanical gyroscope (10) with detection along a vertical axis is provided with a detection structure (10) having a movable structure (12), suspended above a substrate (13) so as to perform, as a function of an angular velocity (Ωz) around the vertical axis a sense movement along a first horizontal axis (x). The movable structure has at least one drive mass (14) internally defining a window (16), elastically coupled to a rotor anchor (20'), at an anchoring region (A), through elastic anchoring elements (21); at least one bridge element (18), rigid and of a conductive material, cantilevered suspended and extending within the window along the first horizontal axis, elastically coupled to the drive mass; movable electrodes (23), carried integrally by the bridge element with extension along a second horizontal axis (y). The detection structure (10) also has stator electrodes (28, 29), arranged in the window and interdigitated with the movable electrodes, at a certain separation distance below the bridge element (18), which extends longitudinally above the same stator electrodes and the movable electrodes.

公开(公告)号：EP4006490A1

公开(公告)日：2022-06-01

申请号：EP21210761.9

申请日：2021-11-26

Applicant: STMicroelectronics S.r.l.

Inventor： GUERINONI, Luca ,  FALORNI, Luca Giuseppe

IPC: G01C19/5733 ,  G01C25/00

Abstract: A microelectromechanical gyroscope includes: the support structure (6); a sensing mass (3), coupled to the support structure (6) with degrees of freedom along a driving direction (DD) and a sensing direction (DS) perpendicular to each other; and a calibration structure (5) facing the sensing mass (3) and separated from the sensing mass (3) by a gap (21) having an average width (W), the calibration structure (5) being movable with respect to the sensing mass (3) so that displacements of the calibration structure (5) cause variations in the average width (W) of the gap (21) . A calibration actuator (20, 30) controls a relative position of the calibration structure (5) with respect to the sensing mass (3) and the average width (W) of the gap (21).

公开(公告)号：EP3217147B1

公开(公告)日：2018-12-12

申请号：EP16194684.3

申请日：2016-10-19

Applicant: STMicroelectronics S.r.l.

Inventor： GATTERE, Gabriele ,  FALORNI, Luca Giuseppe ,  VALZASINA, Carlo

IPC: G01C19/5712

CPC classification number: G01C19/5712

Abstract: A micromechanical detection structure (20) comprises: a substrate (2) of semiconductor material; a driving-mass arrangement (4a-4c), coupled to a set of driving electrodes (7a-7c) and driven in a driving movement following upon biasing of the set of driving electrodes; a first anchorage unit (5a-5c, 6a-6c), coupled to the driving-mass arrangement for elastically coupling the driving-mass arrangement to the substrate (2) at first anchorages (5a-5c); a driven-mass arrangement (10, 30), elastically coupled to the driving-mass arrangement by a coupling unit (22a-22b) and designed to be driven by the driving movement; and a second anchorage unit (14, 34), coupled to the driven-mass arrangement for elastically coupling the driven-mass arrangement to the substrate (2) at second anchorages (17, 37). Following upon the driving movement, the resultant of the forces and of the torques exerted on the substrate (2) at the first and second anchorages is substantially zero.

公开(公告)号：EP3225953A1

公开(公告)日：2017-10-04

申请号：EP16194685.0

申请日：2016-10-19

Applicant: STMicroelectronics S.r.l.

Inventor： GATTERE, Gabriele ,  VALZASINA, Carlo ,  FALORNI, Luca Giuseppe

IPC: G01C19/5712

CPC classification number: G01C19/5747 ,  G01C19/5712

Abstract: A multi-axis MEMS gyroscope (42) is provided with a micromechanical detection structure (10) having: a substrate (12); a driving-mass arrangement (14a-14b); a driven-mass arrangement (20) with a central window (22); a sensing-mass arrangement (20; 35a-35b, 37a-37b), which undergoes sensing movements in the presence of angular velocities about a first horizontal axis (x) and a second horizontal axis (x); a sensing-electrode arrangement (29a-29b, 30a-30b), which is fixed with respect to the substrate and is set underneath the sensing-mass arrangement; and an anchorage assembly (24), set within the central window (22), for constraining the driven-mass arrangement to the substrate at anchorage elements (27). The anchorage assembly comprises a rigid structure (25a-25b), suspended above the substrate, elastically connected to the driven mass by elastic connection elements (26a-26b) at a central portion, and to the anchorage elements by elastic decoupling elements (28) at end portions thereof.

Abstract translation: 一种多轴MEMS陀螺仪（42）具有微机械检测结构（10），该微机械检测结构具有：衬底（12） 驱动质量装置（14a-14b）; 具有中央窗口（22）的驱动质量装置（20）; 感测质量装置（20; 35a-35b，37a-37b），其在围绕第一水平轴线（x）和第二水平轴线（x）的角速度存在下经历感测运动; 感测电极布置（29a-29b，30a-30b），所述感测电极布置相对于所述衬底固定并设置在所述感测质量布置下方; 和设置在中央窗口（22）内的锚固组件（24），用于在锚固元件（27）处约束从动块到衬底。 锚固组件包括悬挂在基底上方的刚性结构（25a-25b），其通过弹性连接元件（26a-26b）在中心部分弹性连接到从动物体，并通过弹性解耦元件（28）与锚固元件弹性连接， 在其端部。

公开(公告)号：EP3217147A1

公开(公告)日：2017-09-13

申请号：EP16194684.3

申请日：2016-10-19

Applicant: STMicroelectronics S.r.l.

Inventor： GATTERE, Gabriele ,  FALORNI, Luca Giuseppe ,  VALZASINA, Carlo

IPC: G01C19/5712

CPC classification number: G01C19/5712

Abstract: A micromechanical detection structure (20) comprises: a substrate (2) of semiconductor material; a driving-mass arrangement (4a-4c), coupled to a set of driving electrodes (7a-7c) and driven in a driving movement following upon biasing of the set of driving electrodes; a first anchorage unit (5a-5c, 6a-6c), coupled to the driving-mass arrangement for elastically coupling the driving-mass arrangement to the substrate (2) at first anchorages (5a-5c); a driven-mass arrangement (10, 30), elastically coupled to the driving-mass arrangement by a coupling unit (22a-22b) and designed to be driven by the driving movement; and a second anchorage unit (14, 34), coupled to the driven-mass arrangement for elastically coupling the driven-mass arrangement to the substrate (2) at second anchorages (17, 37). Following upon the driving movement, the resultant of the forces and of the torques exerted on the substrate (2) at the first and second anchorages is substantially zero.

Abstract translation: 微机械检测结构（20）包括：半导体材料的衬底（2） 驱动质量装置（4a-4c），所述驱动质量装置与一组驱动电极（7a-7c）耦合并且在所述一组驱动电极偏置之后在驱动运动中被驱动; 与所述驱动质量装置联接的第一锚定单元（5a-5c，6a-6c），用于在第一锚固件（5a-5c）处将所述驱动质量装置弹性联接到所述基板（2）; 驱动质量装置（10,30），其通过耦合单元（22a-22b）弹性耦合到所述驱动质量装置并且被设计为由所述驱动运动驱动; 和第二锚定单元（14,34），所述第二锚定单元联接到所述从动质量装置，用于在第二锚定件（17,37）处将所述从动质量装置弹性地联接到所述基底（2）。 在驱动运动之后，在第一和第二锚固件上施加在基板（2）上的力和扭矩的合力大致为零。

公开(公告)号：EP4300040A1

公开(公告)日：2024-01-03

申请号：EP23180883.3

申请日：2023-06-22

Applicant: STMicroelectronics S.r.l.

Inventor： FALORNI, Luca Giuseppe ,  FEDELI, Patrick ,  GATTERE, Gabriele ,  VALZASINA, Carlo ,  CARULLI, Paola

IPC: G01C19/5747

Abstract: MEMS gyroscope (350), having a first movable mass (303, 403) configured to move with respect to a fixed structure along a first drive direction and along a first sense direction, transverse to the first drive direction; a first drive assembly (310), coupled to the first movable mass and configured to generate a first alternate drive movement; a first drive elastic structure (320), coupled to the first movable mass and to the first drive assembly, rigid in the first drive direction and compliant in the first sense direction; a second movable mass (303, 403), configured to move with respect to the fixed structure in a second drive direction parallel to the first drive direction and in a second sense direction parallel to the first sense direction; a second drive assembly (311), coupled to the second movable mass and configured to generate a second alternate drive movement in the second drive direction; and a second drive elastic structure (320), coupled to the second movable mass and to the second drive assembly, rigid in the second drive direction and compliant in the second sense direction.

公开(公告)号：EP4253909A3

公开(公告)日：2023-12-27

申请号：EP23163094.8

申请日：2023-03-21

Applicant: STMicroelectronics S.r.l.

Inventor： FALORNI, Luca Giuseppe ,  CARULLI, Paola ,  FEDELI, Patrick ,  GUERINONI, Luca

IPC: G01C19/574

Abstract: A MEMS angular rate sensor is presented with two pairs of suspended masses that are micromachined on a semiconductor layer. A first pair includes two masses opposite to and in mirror image of each other. The first pair of masses has driving structures to generate a mechanical oscillation in a linear direction. A second pair of masses includes two masses opposite to and in mirror image of each other. The second pair of masses is coupled to the first pair of driving masses with coupling elements. The two pairs of masses are coupled to a central bridge. The central bridge has a differential configuration to reject any external disturbances. Each of the masses of the two pairs of masses includes different portions to detect different linear and angular movements.

公开(公告)号：EP4202919A1

公开(公告)日：2023-06-28

申请号：EP22211612.1

申请日：2022-12-06

Applicant: STMicroelectronics S.r.l.

Inventor： ZEGA, Valentina ,  FALORNI, Luca Giuseppe ,  FRANGI, Attilio ,  GAZZOLA, Chiara

IPC: G10K11/24

Abstract: A MEMS based device (100) includes a phononic crystal body (130) formed from unit cells (131) and having a defect line (141) extending through the phononic crystal body. Unit cells inside of the defect line (141) lack a same phononic bandgap as the unit cells outside of the defect line. An input MEMS resonator (110) is mechanically coupled to a first end of the defect line, and an output MEMS resonator (150) is mechanically coupled to a second end of the defect line. Each of the unit cells (131) outside of the defect line has an identical geometry. The input MEMS resonator (110) and output MEMS resonator (150) each have a natural frequency within the same phononic bandgap possessed by the unit cells (131) outside of the defect line. There may be more than one defect line, and in such cases, the MEMS device may include more than one input MEMS resonator and/or more than one output MEMS resonator.

公开(公告)号：EP3225953B1

公开(公告)日：2019-03-06

申请号：EP16194685.0

申请日：2016-10-19

Applicant: STMicroelectronics S.r.l.

Inventor： GATTERE, Gabriele ,  VALZASINA, Carlo ,  FALORNI, Luca Giuseppe

IPC: G01C19/5712

公开(公告)号：EP4212824A1

公开(公告)日：2023-07-19

申请号：EP23150057.0

申请日：2023-01-02

Applicant: STMicroelectronics S.r.l.

Inventor： FEDELI, Patrick ,  GUERINONI, Luca ,  CARULLI, Paola ,  FALORNI, Luca Giuseppe

IPC: G01C19/5712 ,  B81B7/00 ,  B81B7/02

Abstract: A microelectromechanical gyroscope (10) is provided with a detection structure (11) having: a substrate (14) with a top surface (14a) parallel to a horizontal plane (xy); a mobile mass (12), suspended above the substrate to perform, as a function of a first angular velocity (Ω x ) around a first axis (x) of the horizontal plane (xy), at least a first detection movement of rotation around a second axis (y) of the horizontal plane; and a first and a second stator elements (28a, 28b) integral with the substrate and arranged underneath the mobile mass to define a capacitive coupling, a capacitance value thereof is indicative of the first angular velocity (Ω x ). The detection structure has a single mechanical anchorage structure for anchoring both the mobile mass and the stator elements to the substrate, arranged internally with respect to the mobile mass, which is coupled to this single mechanical anchorage structure by coupling elastic elements (18) yielding to torsion around the second axis; the stator elements are integrally coupled to the single mechanical anchorage structure in an arrangement suspended above the top surface of the substrate.