公开(公告)号：EP4202919A1

公开(公告)日：2023-06-28

申请号：EP22211612.1

申请日：2022-12-06

Applicant: STMicroelectronics S.r.l.

Inventor： ZEGA, Valentina ,  FALORNI, Luca Giuseppe ,  FRANGI, Attilio ,  GAZZOLA, Chiara

IPC: G10K11/24

Abstract: A MEMS based device (100) includes a phononic crystal body (130) formed from unit cells (131) and having a defect line (141) extending through the phononic crystal body. Unit cells inside of the defect line (141) lack a same phononic bandgap as the unit cells outside of the defect line. An input MEMS resonator (110) is mechanically coupled to a first end of the defect line, and an output MEMS resonator (150) is mechanically coupled to a second end of the defect line. Each of the unit cells (131) outside of the defect line has an identical geometry. The input MEMS resonator (110) and output MEMS resonator (150) each have a natural frequency within the same phononic bandgap possessed by the unit cells (131) outside of the defect line. There may be more than one defect line, and in such cases, the MEMS device may include more than one input MEMS resonator and/or more than one output MEMS resonator.