公开(公告)号：EP4223691A1

公开(公告)日：2023-08-09

申请号：EP23153332.4

申请日：2023-01-25

Applicant: STMicroelectronics S.r.l.

Inventor： OPRENI, Andrea ,  ZEGA, Valentina ,  FRANGI, Attilio ,  GATTERE, Gabriele ,  RIANI, Manuel

IPC: B81B3/00

Abstract: MEMS actuator (20) including: a substrate (21); a first and a second semiconductive layer (31,32); a frame (27) including transverse regions (62) formed by the second semiconductive layer (32), elongated parallel to a first direction (X) and offset along a second direction (Y), the frame (27) being movable parallel to the second direction (Y). The MEMS actuator (20) includes, for each transverse region (62): corresponding front rotor regions (65), which are fixed to the transverse region (62) and are suspended above the substrate (21); a first and a second stator region (70,72), which are formed by the first semiconductive layer (31) in such a way that, when the frame (27) is in rest position, the transverse region (62) is laterally offset with respect to the first and the second stator regions (70,72) and a first front rotor region (65') partially faces the first stator region (70), and in such a way that, during a translation of the frame (27) along the second direction (Y), the first and/or a second front rotor region (65', 65") at least partially face the second stator region (72), when the transverse region (62) begins to superimpose on the first stator region (70).

公开(公告)号：EP4202919A1

公开(公告)日：2023-06-28

申请号：EP22211612.1

申请日：2022-12-06

Applicant: STMicroelectronics S.r.l.

Inventor： ZEGA, Valentina ,  FALORNI, Luca Giuseppe ,  FRANGI, Attilio ,  GAZZOLA, Chiara

IPC: G10K11/24

Abstract: A MEMS based device (100) includes a phononic crystal body (130) formed from unit cells (131) and having a defect line (141) extending through the phononic crystal body. Unit cells inside of the defect line (141) lack a same phononic bandgap as the unit cells outside of the defect line. An input MEMS resonator (110) is mechanically coupled to a first end of the defect line, and an output MEMS resonator (150) is mechanically coupled to a second end of the defect line. Each of the unit cells (131) outside of the defect line has an identical geometry. The input MEMS resonator (110) and output MEMS resonator (150) each have a natural frequency within the same phononic bandgap possessed by the unit cells (131) outside of the defect line. There may be more than one defect line, and in such cases, the MEMS device may include more than one input MEMS resonator and/or more than one output MEMS resonator.

公开(公告)号：EP3312559A1

公开(公告)日：2018-04-25

申请号：EP17177405.2

申请日：2017-06-22

Applicant: STMicroelectronics S.r.l.

Inventor： TOCCHIO, Alessandro ,  FALORNI, Luca Giuseppe ,  COMI, Claudia ,  ZEGA, Valentina

IPC: G01C19/574

CPC classification number: G01C19/5747 ,  G01C19/574 ,  G01C19/5769

Abstract: A frequency modulation MEMS triaxial gyroscope (10), having two mobile masses (11A, 11B); a first and a second driving body (31A, 31B) coupled to the mobile masses (11A, 11B) through elastic elements (41A, 41B) rigid in a first direction (X) and compliant in a second direction transverse to the first direction (Y); and a third and a fourth driving body (32A, 32B) coupled to the mobile masses through elastic elements (42A, 42B) rigid in the second direction and compliant in the first direction (X). A first and a second driving element (59A) are coupled to the first and second driving bodies (31A, 31B) for causing the mobile masses to translate in the first direction in phase opposition. A third and a fourth driving element (63A) are coupled to the third and fourth driving bodies (32A, 32B) for causing the mobile masses to translate in the second direction and in phase opposition. An out-of-plane driving element (68A) is coupled to the first and second mobile masses for causing a translation in a third direction (Z), in phase opposition. Movement-sensing electrodes (60A, 64A, 69A) generate frequency signals as a function of external angular velocities.

Abstract translation: 一种频率调制MEMS三轴陀螺仪（10），具有两个移动质量块（11A，11B）; 第一和第二驱动体（31A，31B），其通过在第一方向（X）上刚性且在横向于第一方向（X）的第二方向上柔性的弹性元件（41A，41B） Y）; 以及通过在第二方向上刚性且在第一方向（X）上柔性的弹性元件（42A，42B）联接到移动质量块的第三和第四驱动体（32A，32B）。 第一和第二驱动元件（59A）联接到第一和第二驱动体（31A，31B），用于使可动质量块在第一方向上反相平移。 第三和第四驱动元件（63A）联接到第三和第四驱动体（32A，32B），用于使可动质量块在第二方向上平移并且反相。 平面外驱动元件（68A）联接到第一和第二可动质量块上，用于在第三方向（Z）上进行反相的平移。 运动感测电极（60A，64A，69A）产生作为外部角速度的函数的频率信号。

公开(公告)号：EP4152010A1

公开(公告)日：2023-03-22

申请号：EP22195322.7

申请日：2022-09-13

Applicant: STMicroelectronics S.r.l.

Inventor： ZEGA, Valentina ,  GATTERE, Gabriele ,  FRANGI, Attilio ,  OPRENI, Andrea ,  RIANI, Manuel

IPC: G01P15/097 ,  G01P15/08

Abstract: A detection structure (1) for a vertical-axis resonant accelerometer (32) is provided with: an inertial mass (2), suspended above a substrate (8) and having a window (5) provided therewithin and traversing it throughout a thickness thereof, the inertial mass (2) being coupled to a main anchorage (4), arranged in the window and integral with the substrate, through a first and a second anchoring elastic element (6a, 6b) of a torsional type and defining a rotation axis (A) of the inertial mass, such that they allow the inertial mass an inertial movement of rotation in response to an external acceleration (a ext ) acting along a vertical axis (z); and at least a first resonator element (10a), having longitudinal extension, coupled between the first elastic element and a first constraint element (12a) arranged in the window. The first constraint element is suspended above the substrate, to which it is fixedly coupled through a first auxiliary anchoring element (14a) which extends below the first resonator element with longitudinal extension and is integrally coupled between the first constraint element and the main anchorage (4).