公开(公告)号：EP1624284A1

公开(公告)日：2006-02-08

申请号：EP04425573.5

申请日：2004-07-29

Applicant: STMicroelectronics S.r.l.

Inventor： Sassolini, Simone ,  del Sarto, Marco ,  Baldo, Lorenzo ,  Marchi, Mauro

IPC: G01C19/56

CPC classification number: G01C19/5755 ,  G01C19/5769

Abstract: The semiconductor inertial sensor (30) is formed by a rotor element (38) and a stator element (39) electrostatically coupled together. The rotor element (38) is formed by a suspended mass (40) and by a plurality of mobile electrodes (41) extending from the suspended mass (40). The stator element (39) is formed by a plurality of fixed electrodes (42) facing respective mobile electrodes (41). The suspended mass (40) is supported by elastic suspension elements (45). The suspended mass (40) has a first, larger, thickness (t1 + t2), and the elastic suspension elements (45) have a second thickness (t1), smaller than the first thickness.

Abstract translation: 半导体惯性传感器（30）由静电耦合在一起的转子元件（38）和定子元件（39）形成。 转子元件（38）由悬挂质量块（40）和从悬浮块（40）延伸的多个可移动电极（41）形成。 定子元件（39）由面对各自的可动电极（41）的多个固定电极（42）形成。 悬挂质量（40）由弹性悬挂元件（45）支撑。 悬挂质量（40）具有第一，较大的厚度（t1 + t2），并且弹性悬挂元件（45）具有小于第一厚度的第二厚度（t1）。