-
1.Integrated triaxial magnetometer of semiconductor material manufactured in MEMS technology 有权
Title translation: 集成三轴磁力计在半导体MEMS技术。公开(公告)号:EP2333572B1
公开(公告)日:2012-10-24
申请号:EP10194490.8
申请日:2010-12-10
Applicant: STMicroelectronics Srl
Inventor: Baldo, Lorenzo , Procopio, Francesco , Zerbini, Sarah
IPC: G01R33/00
CPC classification number: G01R33/0286 , G01R33/0005 , G01R33/028 , G01R33/038