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    Uniaxial or biaxial microelectromechanical gyroscope with improved sensitivity to angular velocity detection
    7.
    发明公开
    Uniaxial or biaxial microelectromechanical gyroscope with improved sensitivity to angular velocity detection 审中-公开
    Einachsiges oder zweiachsiges mikroelektromechanisches Gyroskop mit verbesserter Empfindlichkeit der Winkelgeschwindigkeitsdetektion

    公开(公告)号：EP2192383A1

    公开(公告)日：2010-06-02

    申请号：EP09177122.0

    申请日：2009-11-25

    Applicant: STMicroelectronics Srl

    Inventor： Coronato, Luca ,  Cazzaniga, Gabriele ,  Zerbini, Sarah

    IPC: G01C19/56

    CPC classification number: G01C19/5712

    Abstract: Described herein is an integrated microelectromechanical structure (30), provided with: a driving mass (3), anchored to a substrate (2) via elastic anchorage elements (8a, 8b) and moved in a plane (xy) with a driving movement; and a first sensing mass (16a'), suspended inside, and coupled to, the driving mass via elastic supporting elements (20') so as to be fixed with respect to the driving mass (3) in the driving movement and to perform a detection movement of rotation out of the plane (xy) in response to a first angular velocity (Ω x ); the elastic anchorage elements (8a, 8b) and the elastic supporting elements (20') cause the detection movement to be decoupled from the driving movement. The elastic supporting elements are coupled to the first sensing mass (16a') at an end portion (31; 31') thereof, and the axis of rotation of the detection movement extends, within the first sensing mass, only through the aforesaid end portion.

    Abstract translation: 本文描述的是集成的微机电结构（30），其设置有驱动质量块（3），通过弹性锚固元件（8a，8b）锚固到基底（2）并且在驱动运动的平面（xy）中移动; 以及第一感测质量块（16a'），其通过弹性支撑元件（20'）悬挂在驱动质量块内并且联接到驱动质量块，以便在驱动运动中相对于驱动质量块（3）固定，并执行 响应于第一角速度（x x）检测旋转出平面的运动（xy）; 弹性锚固元件（8a，8b）和弹性支撑元件（20'）使检测运动与驱动运动分离。 弹性支撑元件在其端部（31; 31'）处联接到第一感测块（16a'），并且检测运动的旋转轴线在第一感测质量块内仅延伸通过前述端部 。

    Uniaxial or biaxial microelectromechanical gyroscope with improved sensitivity to angular velocity detection
    8.
    发明授权
    Uniaxial or biaxial microelectromechanical gyroscope with improved sensitivity to angular velocity detection 有权

    公开(公告)号：EP2192383B1

    公开(公告)日：2018-10-03

    申请号：EP09177122.0

    申请日：2009-11-25

    Applicant: STMicroelectronics Srl

    Inventor： Coronato, Luca ,  Cazzaniga, Gabriele ,  Zerbini, Sarah

    IPC: G01C19/5712

    CPC classification number: G01C19/5712

    Abstract: Described herein is an integrated microelectromechanical structure (30), provided with: a driving mass (3), anchored to a substrate (2) via elastic anchorage elements (8a, 8b) and moved in a plane (xy) with a driving movement; and a first sensing mass (16a'), suspended inside, and coupled to, the driving mass via elastic supporting elements (20') so as to be fixed with respect to the driving mass (3) in the driving movement and to perform a detection movement of rotation out of the plane (xy) in response to a first angular velocity (© x ); the elastic anchorage elements (8a, 8b) and the elastic supporting elements (20') cause the detection movement to be decoupled from the driving movement. The elastic supporting elements are coupled to the first sensing mass (16a') at an end portion (31; 31') thereof, and the axis of rotation of the detection movement extends, within the first sensing mass, only through the aforesaid end portion.

    Microelectromechanical gyroscope with rotary driving motion and improved electrical properties
    10.
    发明公开
    Microelectromechanical gyroscope with rotary driving motion and improved electrical properties 有权
    Mikroelektromechanisches Gyroskop mit Rotationsantriebsbewegung und verb desserten elektrischen Eigenschaften

    公开(公告)号：EP2192382A1

    公开(公告)日：2010-06-02

    申请号：EP09177114.7

    申请日：2009-11-25

    Applicant: STMicroelectronics Srl

    Inventor： Coronato, Luca ,  Cazzaniga, Gabriele ,  Zerbini, Sarah

    IPC: G01C19/56

    CPC classification number: G01C19/56 ,  G01C19/5712 ,  Y10T29/49002

    Abstract: Integrated microelectromechanical structure (30), provided with: a die (2), having a substrate (2) and a frame (2b), defining inside it a detection region (2c) and having a first side extending along a first horizontal axis (x); a driving mass (3), anchored to the substrate (2), set in the detection region (2c), and rotatable in a plane (xy) with an actuation movement about a vertical axis (z); and first and second pairs (16a',16b';16c',16d') of first sensing masses, suspended inside the driving mass (3) via elastic supporting elements (20) so as to perform a detection movement of rotation out of the plane (xy) in response to a first angular velocity (Ω x ); wherein the first sensing masses of the first pair (16a',16b') and the first sensing masses of the second pair (16c',16d') are aligned in respective directions (x 1 , X 2 ), having non zero inclinations of opposite sign with respect to the first horizontal axis (x).

    Abstract translation: 集成的微机电结构（30），具有：具有基板（2）和框架（2b）的模具（2），在其内部限定有检测区域（2c），并具有沿第一水平轴线延伸的第一侧面 X）; 固定到基板（2）上的驱动质量块（3），其设置在检测区域（2c）中，并且可以围绕垂直轴线（z）以致动运动在平面（xy）中旋转; 以及经由弹性支撑元件（20）悬挂在驱动质量块（3）内部的第一感测质量的第一和第二对（16a'，16b'; 16c'，16d'），以便执行从 平面（xy）响应于第一角速度（x x）; 其中第一对（16a'，16b'）的第一感测质量和第二对（16c'，16d'）的第一感测质量在相应的方向（x 1，X 2）上对准， 相对于第一横轴（x）相反的符号。

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