公开(公告)号：US10109465B2

公开(公告)日：2018-10-23

申请号：US15533265

申请日：2015-11-20

Applicant: Seagate Technology LLC

Inventor： Romulo Ata ,  ZhaoHui Fan ,  Samuel Tanaka ,  Christopher Platt ,  Xiaoding Ma

IPC: H01J1/94 ,  H01J37/32 ,  H01K1/18 ,  C23C16/26 ,  C23C16/50

Abstract: A vapor deposition source that includes a substantially vertical plate to which first and second filament posts are coupled. The vapor deposition source also includes a filament having a first end and a second end. The filament provides a substantially concentric source of electrons. The first end of the filament is connected to the first filament post and the second end of the filament is connected to the second filament post. The first end of the filament is substantially vertically aligned with the second end of the filament when the filament is connected to the first and second posts.

公开(公告)号：US20170365448A1

公开(公告)日：2017-12-21

申请号：US15533265

申请日：2015-11-20

Applicant: Seagate Technology LLC

Inventor： Romulo Ata ,  ZhaoHui Fan ,  Samuel Tanaka ,  Christopher Platt ,  Xiaoding Ma

IPC: H01J37/32 ,  C23C16/26 ,  C23C16/50

CPC classification number: H01J37/32568 ,  C23C16/26 ,  C23C16/50 ,  H01J37/3233 ,  H01J37/32403 ,  H01J37/3244 ,  H01J37/32449 ,  H01J37/32541 ,  H01J2237/032 ,  H01J2237/3321 ,  H01K1/18

Abstract: A vapor deposition source that includes a substantially vertical plate to which first and second filament posts are coupled. The vapor deposition source also includes a filament having a first end and a second end. The filament provides a substantially concentric source of electrons. The first end of the filament is connected to the first filament post and the second end of the filament is connected to the second filament post. The first end of the filament is substantially vertically aligned with the second end of the filament when the filament is connected to the first and second posts.