公开(公告)号：US20160146722A1

公开(公告)日：2016-05-26

申请号：US14937444

申请日：2015-11-10

Applicant: Universität Stuttgart

Inventor： Klaus Koerner ,  Arnulf Roeseler ,  Daniel Claus ,  Wolfgang Osten

IPC: G01N21/21 ,  G01B9/02 ,  G01N21/65

CPC classification number: G01N21/211 ,  G01B9/02091 ,  G01N21/65 ,  G01N2021/212 ,  G01N2021/213

Abstract: Disclosed herein is an apparatus for spectroscopic ellipsometry, preferably for infrared spectroscopic ellipsometry, and a method for spectroscopic ellipsometry employing the apparatus. In some embodiments, the apparatus may comprise a light source (12), a detector (30), a polarizer (40), an analyzer (41), and a measuring probe (10). In one embodiment, the measuring probe may comprise an ATR prism (50) having at least one first surface having at least one measuring portion (M) configured to be brought in optical contact with a measured object (72), and at least one second surface having at least one reflective portion (RX).

Abstract translation: 本文公开了一种用于光谱椭偏仪的装置，优选用于红外光谱椭偏仪，以及使用该装置的光谱椭偏仪的方法。 在一些实施例中，该装置可以包括光源（12），检测器（30），偏振器（40），分析器（41）和测量探针（10）。 在一个实施例中，测量探针可以包括具有至少一个第一表面的至少一个第一表面的ATR棱镜（50），所述至少一个第一表面具有至少一个测量部分（M），其被配置为与测量对象（72）进行光学接触，以及至少一个第二 表面具有至少一个反射部分（RX）。

公开(公告)号：US09383306B2

公开(公告)日：2016-07-05

申请号：US14937444

申请日：2015-11-10

Applicant: Universität Stuttgart

Inventor： Klaus Koerner ,  Arnulf Roeseler ,  Daniel Claus ,  Wolfgang Osten

IPC: G01J3/447 ,  G01N21/21 ,  G01N21/65 ,  G01B9/02

CPC classification number: G01N21/211 ,  G01B9/02091 ,  G01N21/65 ,  G01N2021/212 ,  G01N2021/213

Abstract: Disclosed herein is an apparatus for spectroscopic ellipsometry, preferably for infrared spectroscopic ellipsometry, and a method for spectroscopic ellipsometry employing the apparatus. In some embodiments, the apparatus may comprise a light source (12), a detector (30), a polarizer (40), an analyzer (41), and a measuring probe (10). In one embodiment, the measuring probe may comprise an ATR prism (50) having at least one first surface having at least one measuring portion (M) configured to be brought in optical contact with a measured object (72), and at least one second surface having at least one reflective portion (RX).

公开(公告)号：US20160143539A1

公开(公告)日：2016-05-26

申请号：US14936048

申请日：2015-11-09

Applicant: Universität Stuttgart

Inventor： Klaus Koerner ,  Daniel Claus ,  Alois Herkommer ,  Wolfgang Osten

IPC: A61B5/00 ,  G01J3/42 ,  G01J3/02

CPC classification number: A61B5/0086 ,  A61B5/0035 ,  A61B5/0066 ,  A61B5/0075 ,  A61B5/4836 ,  A61B5/6848 ,  A61B2562/0238 ,  A61N2005/0612 ,  G01J3/0202 ,  G01J3/0213 ,  G01J3/42 ,  G01N21/552 ,  G01N21/8507 ,  G01N2021/434

Abstract: Disclosed herein is a measuring probe, an apparatus, and a method for infrared spectroscopy. In some embodiments the measuring probe may have an elongated form with a first end for coupling and decoupling infrared light into and out of the measuring probe and a second end. In other embodiments, the measuring probe may comprise an attenuated total reflection (ATR) prism arranged at the second end of the measuring probe. The ATR prism may include at least a first surface having at least one measuring portion configured to be brought in optical contact with a measured object. The ATR prism may include at least a second surface having at least one reflective portion. In some embodiments, the ATR prism may include a cutting portion for cutting through the measured object.

Abstract translation: 本文公开了一种用于红外光谱的测量探针，装置和方法。 在一些实施例中，测量探针可以具有细长形式，其具有第一端，用于将红外光耦合和分离出测量探针和从测量探针和第二端分离。 在其他实施例中，测量探针可以包括布置在测量探针的第二端处的衰减全反射（ATR）棱镜。 ATR棱镜可以包括至少一个第一表面，该第一表面具有至少一个测量部分，该测量部分被配置为与测量对象进行光学接触。 ATR棱镜可以包括具有至少一个反射部分的至少第二表面。 在一些实施例中，ATR棱镜可以包括用于切割被测物体的切割部分。

公开(公告)号：US09772275B2

公开(公告)日：2017-09-26

申请号：US14840728

申请日：2015-08-31

Applicant: Universität Stuttgart

Inventor： Klaus Koerner ,  Christof Pruss ,  Alois Herkommer ,  Wolfgang Osten ,  Daniel Claus

IPC: G01N21/35 ,  A61B10/02 ,  A61B5/00

CPC classification number: G01N21/35 ,  A61B5/0086 ,  A61B5/6848 ,  A61B10/0266 ,  G01N2201/06113

Abstract: Disclosed herein is a measuring probe and an arrangement for measuring spectral absorption, preferably in the infrared. Furthermore, the invention relates to a method for spectroscopically measuring absorption. The measuring probe may comprise a cutting apparatus configured to cut a slice or respectively flap off of a sample to be measured; a measuring gap configured to accommodate the sample slice; an optical window element for coupling measuring light into, or respectively out of the measuring gap; and an end reflector designed and arranged to reflect the measuring light propagated through the measuring gap back into the measuring gap. The arrangement for measuring spectral absorption may comprise the measuring probe, a light source and an apparatus for the spectral analysis of the measuring light coupled out of the measuring gap.

公开(公告)号：US20160076997A1

公开(公告)日：2016-03-17

申请号：US14840728

申请日：2015-08-31

Applicant: Universität Stuttgart

Inventor： Klaus Koerner ,  Christof Pruss ,  Alois Herkommer ,  Wolfgang Osten ,  Daniel Claus

IPC: G01N21/35

CPC classification number: G01N21/35 ,  A61B5/0086 ,  A61B5/6848 ,  A61B10/0266 ,  G01N2201/06113

Abstract: Disclosed herein is a measuring probe and an arrangement for measuring spectral absorption, preferably in the infrared. Furthermore, the present disclosure relates to a method for spectroscopically measuring absorption. In some embodiments, the measuring probe may comprise a cutting apparatus configured to cut a slice or respectively flap off of a sample to be measured; a measuring gap configured to accommodate the sample slice; an optical window element for coupling measuring light into, or respectively out of the measuring gap; and an end reflector designed and arranged to reflect the measuring light propagated through the measuring gap back into the measuring gap. The arrangement for measuring spectral absorption may comprise the measuring probe, a light source and an apparatus for the spectral analysis of the measuring light coupled out of the measuring gap.

Abstract translation: 本文公开了一种测量探针和用于测量光谱吸收的装置，优选地在红外线中。 此外，本公开涉及用于光谱测量吸收的方法。 在一些实施例中，测量探针可以包括切割装置，其被配置为切割切片或分别从要测量的样品折回; 测量间隙，被配置成容纳样品切片; 用于将测量光耦合到测量间隙中或分别离开测量间隙的光学窗口元件; 以及设计和布置成将通过测量间隙传播的测量光反射回测量间隙的端部反射器。 用于测量光谱吸收的布置可以包括测量探针，光源和用于对测量间隙耦合的测量光进行光谱分析的装置。