公开(公告)号：US11957059B2

公开(公告)日：2024-04-09

申请号：US17294152

申请日：2019-11-15

Applicant: Xaar Technology Limited

Inventor： Andrew Vella ,  Peter Mardilovich

IPC: H01L41/053 ,  B41J2/14 ,  B41J2/16 ,  B81B3/00 ,  H10N30/00 ,  H10N30/20 ,  H10N30/853 ,  H10N30/87 ,  H10N30/88

CPC classification number: H10N30/883 ,  B41J2/14201 ,  B41J2/1623 ,  B41J2/1628 ,  B81B3/0021 ,  H10N30/10516 ,  H10N30/2047 ,  H10N30/8554 ,  H10N30/8561 ,  H10N30/871 ,  B81B2201/057 ,  B81B2203/04

Abstract: The present invention relates to an electrical component for a microelectromechanical systems (MEMS) device, in particular, but not limited to, an electromechanical actuator. In one aspect, the present invention provides an insulated electrical component for a microelectromechanical systems device comprising: i) a substrate layer comprising first and second sides spaced apart in a thickness direction; ii) one or more electrical elements arranged over the first side of the substrate layer, wherein each of the one or more electrical elements comprises: a) a ceramic member; and b) first and second electrodes disposed adjacent the ceramic member such that a potential difference may be established between the first and second electrodes and through the ceramic member during operation; iii) a continuous insulating layer, or laminate of insulating layers, arranged to overlie each of the one or more electrical elements arranged on the first side of the substrate layer; and iv) a passivation layer, or laminate of multiple passivation layers, disposed adjacent to, and at least partially overlying, each of the one or more electrical elements so as to provide electrical passivation between the first and second electrodes of each of the one or more electrical elements; wherein: a) the passivation layer, or at least an innermost layer of the laminate of multiple passivation layers which is disposed adjacent each of the one or more underlying electrical elements, is discontinuous; and/or b) the laminate of multiple passivation layers is recessed at a side which faces away from each of the underlying electrical elements, wherein a recess is provided in a region overlying each of the one or more electrical elements, such that the laminate of passivation layers is thinner in a thickness direction across the recess compared to other non-recessed regions of the laminate of passivation layers.

公开(公告)号：US11770976B2

公开(公告)日：2023-09-26

申请号：US17294207

申请日：2019-11-15

Applicant: Xaar Technology Limited

Inventor： Andrew Vella ,  Peter Mardilovich

IPC: H10N30/88 ,  B41J2/14 ,  H10N30/00 ,  H10N39/00

CPC classification number: H10N30/883 ,  B41J2/14274 ,  H10N30/10516 ,  H10N39/00

Abstract: The present invention relates to an electrical component for a microelectromechanical systems (MEMS) device, in particular, but not limited to, an electromechanical actuator. In one aspect, the present invention provides an electrical component for a microelectromechanical systems device comprising: i) a substrate layer; ii) a plurality of adjacent electrical elements arranged over the substrate layer, where each electrical element is separated from a neighbouring electrical element by an intermediate region, each of the plurality of electrical elements comprising: a) a ceramic member; and b) first and second electrodes disposed adjacent the ceramic member such that a potential difference may be established between the first and second electrodes and through the ceramic member during operation; iii) a passivation layer, or a laminate of multiple passivation layers, at least partially overlying each of the plurality of electrical elements so as to provide electrical passivation between the first and second electrodes of each of the plurality of electrical elements; wherein the passivation layer, or at least an innermost layer of the laminate of passivation layers which is disposed adjacent each underlying electrical element, is discontinuous over at least one intermediate region between neighbouring electrical elements of the electrical component.

公开(公告)号：US20220006001A1

公开(公告)日：2022-01-06

申请号：US17294207

申请日：2019-11-15

Applicant: Xaar Technology Limited

Inventor： Andrew Vella ,  Peter Mardilovich

IPC: H01L41/053 ,  H01L41/08 ,  H01L27/20 ,  B41J2/14

Abstract: The present invention relates to an electrical component for a microelectromechanical systems (MEMS) device, in particular, but not limited to, an electromechanical actuator. In one aspect, the present invention provides an electrical component for a microelectromechanical systems device comprising: i) a substrate layer; ii) a plurality of adjacent electrical elements arranged over the substrate layer, where each electrical element is separated from a neighbouring electrical element by an intermediate region, each of the plurality of electrical elements comprising: a) a ceramic member; and b) first and second electrodes disposed adjacent the ceramic member such that a potential difference may be established between the first and second electrodes and through the ceramic member during operation; iii) a passivation layer, or a laminate of multiple passivation layers, at least partially overlying each of the plurality of electrical elements so as to provide electrical passivation between the first and second electrodes of each of the plurality of electrical elements; wherein the passivation layer, or at least an innermost layer of the laminate of passivation layers which is disposed adjacent each underlying electrical element, is discontinuous over at least one intermediate region between neighbouring electrical elements of the electrical component.

公开(公告)号：US20220006000A1

公开(公告)日：2022-01-06

申请号：US17294152

申请日：2019-11-15

Applicant: Xaar Technology Limited

Inventor： Andrew Vella ,  Peter Mardilovich

IPC: H01L41/053 ,  B41J2/14 ,  B41J2/16 ,  H01L41/047 ,  H01L41/08 ,  H01L41/09 ,  H01L41/187 ,  B81B3/00

Abstract: The present invention relates to an electrical component for a microelectromechanical systems (MEMS) device, in particular, but not limited to, an electromechanical actuator. In one aspect, the present invention provides an insulated electrical component for a microelectromechanical systems device comprising: i) a substrate layer comprising first and second sides spaced apart in a thickness direction; ii) one or more electrical elements arranged over the first side of the substrate layer, wherein each of the one or more electrical elements comprises: a) a ceramic member; and b) first and second electrodes disposed adjacent the ceramic member such that a potential difference may be established between the first and second electrodes and through the ceramic member during operation; iii) a continuous insulating layer, or laminate of insulating layers, arranged to overlie each of the one or more electrical elements arranged on the first side of the substrate layer; and iv) a passivation layer, or laminate of multiple passivation layers, disposed adjacent to, and at least partially overlying, each of the one or more electrical elements so as to provide electrical passivation between the first and second electrodes of each of the one or more electrical elements; wherein: a) the passivation layer, or at least an innermost layer of the laminate of multiple passivation layers which is disposed adjacent each of the one or more underlying electrical elements, is discontinuous; and/or b) the laminate of multiple passivation layers is recessed at a side which faces away from each of the underlying electrical elements, wherein a recess is provided in a region overlying each of the one or more electrical elements, such that the laminate of passivation layers is thinner in a thickness direction across the recess compared to other non-recessed regions of the laminate of passivation layers.