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公开(公告)号：US20220006001A1
公开(公告)日：2022-01-06
申请号：US17294207
申请日：2019-11-15
Applicant: Xaar Technology Limited
Inventor： Andrew Vella , Peter Mardilovich
IPC: H01L41/053 , H01L41/08 , H01L27/20 , B41J2/14
Abstract: The present invention relates to an electrical component for a microelectromechanical systems (MEMS) device, in particular, but not limited to, an electromechanical actuator. In one aspect, the present invention provides an electrical component for a microelectromechanical systems device comprising: i) a substrate layer; ii) a plurality of adjacent electrical elements arranged over the substrate layer, where each electrical element is separated from a neighbouring electrical element by an intermediate region, each of the plurality of electrical elements comprising: a) a ceramic member; and b) first and second electrodes disposed adjacent the ceramic member such that a potential difference may be established between the first and second electrodes and through the ceramic member during operation; iii) a passivation layer, or a laminate of multiple passivation layers, at least partially overlying each of the plurality of electrical elements so as to provide electrical passivation between the first and second electrodes of each of the plurality of electrical elements; wherein the passivation layer, or at least an innermost layer of the laminate of passivation layers which is disposed adjacent each underlying electrical element, is discontinuous over at least one intermediate region between neighbouring electrical elements of the electrical component.
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公开(公告)号：US20220006000A1
公开(公告)日：2022-01-06
申请号：US17294152
申请日：2019-11-15
Applicant: Xaar Technology Limited
Inventor： Andrew Vella , Peter Mardilovich
IPC: H01L41/053 , B41J2/14 , B41J2/16 , H01L41/047 , H01L41/08 , H01L41/09 , H01L41/187 , B81B3/00
Abstract: The present invention relates to an electrical component for a microelectromechanical systems (MEMS) device, in particular, but not limited to, an electromechanical actuator. In one aspect, the present invention provides an insulated electrical component for a microelectromechanical systems device comprising: i) a substrate layer comprising first and second sides spaced apart in a thickness direction; ii) one or more electrical elements arranged over the first side of the substrate layer, wherein each of the one or more electrical elements comprises: a) a ceramic member; and b) first and second electrodes disposed adjacent the ceramic member such that a potential difference may be established between the first and second electrodes and through the ceramic member during operation; iii) a continuous insulating layer, or laminate of insulating layers, arranged to overlie each of the one or more electrical elements arranged on the first side of the substrate layer; and iv) a passivation layer, or laminate of multiple passivation layers, disposed adjacent to, and at least partially overlying, each of the one or more electrical elements so as to provide electrical passivation between the first and second electrodes of each of the one or more electrical elements; wherein: a) the passivation layer, or at least an innermost layer of the laminate of multiple passivation layers which is disposed adjacent each of the one or more underlying electrical elements, is discontinuous; and/or b) the laminate of multiple passivation layers is recessed at a side which faces away from each of the underlying electrical elements, wherein a recess is provided in a region overlying each of the one or more electrical elements, such that the laminate of passivation layers is thinner in a thickness direction across the recess compared to other non-recessed regions of the laminate of passivation layers.
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公开(公告)号：US20170358732A1
公开(公告)日：2017-12-14
申请号：US15523968
申请日：2015-11-04
Applicant: XAAR TECHNOLOGY LIMITED
Inventor： Peter Mardilovich , Susan Trolier-Mckinstry
IPC: H01L41/18 , H01L41/318 , B41J2/14 , H01L41/29 , H01L41/047 , H01L41/09
CPC classification number: H01L41/18 , B41J2/14233 , B41J2002/14266 , H01L41/047 , H01L41/0805 , H01L41/0973 , H01L41/1876 , H01L41/29 , H01L41/318
Abstract: A piezoelectric thin film element having a first electrode, a second electrode and a piezoelectric thin film between the electrodes, wherein the thin film comprises a laminate having two or more piezoelectric thin film layers and wherein a first thin film layer is doped by one or more dopants and a second film layer is doped by one or more dopants and wherein at least one dopant of the second thin film layer is different from the dopant or dopants of the first thin film layer.
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公开(公告)号：US20190006574A1
公开(公告)日：2019-01-03
申请号：US15735905
申请日：2016-06-10
Applicant: XAAR TECHNOLOGY LIMITED
IPC: H01L41/083 , H01L41/047 , H01L41/09 , H01L41/277 , H01L41/293 , B41J2/14
Abstract: There is disclosed a piezoelectric thin film element comprising a first electrode, a second electrode and one or more piezoelectric thin films there between characterised in that the thin film element has at least two of: an electrode arrangement in which electrodes are arranged with the one or more piezoelectric thin films so that an electric field applied to a piezoelectric thin film or a portion of a piezoelectric thin film adjacent to the first electrode is lower than an electric field applied to a piezoelectric thin film or a portion of a piezoelectric thin film further from the first electrode when the piezoelectric thin film element actuated; a piezoelectric thin film adjacent to the first electrode in which a layer of the piezoelectric thin film near to the first electrode has a piezoelectric displacement constant which is lower than that of a layer of the piezoelectric thin film further from the first electrode; and a piezoelectric thin film adjacent to the first electrode in which a layer of the piezoelectric thin film near to the first electrode has an elastic modulus which is lower than that of a layer of the piezoelectric thin film further from the first electrode.
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公开(公告)号：US11957059B2
公开(公告)日：2024-04-09
申请号：US17294152
申请日：2019-11-15
Applicant: Xaar Technology Limited
Inventor： Andrew Vella , Peter Mardilovich
IPC: H01L41/053 , B41J2/14 , B41J2/16 , B81B3/00 , H10N30/00 , H10N30/20 , H10N30/853 , H10N30/87 , H10N30/88
CPC classification number: H10N30/883 , B41J2/14201 , B41J2/1623 , B41J2/1628 , B81B3/0021 , H10N30/10516 , H10N30/2047 , H10N30/8554 , H10N30/8561 , H10N30/871 , B81B2201/057 , B81B2203/04
Abstract: The present invention relates to an electrical component for a microelectromechanical systems (MEMS) device, in particular, but not limited to, an electromechanical actuator. In one aspect, the present invention provides an insulated electrical component for a microelectromechanical systems device comprising: i) a substrate layer comprising first and second sides spaced apart in a thickness direction; ii) one or more electrical elements arranged over the first side of the substrate layer, wherein each of the one or more electrical elements comprises: a) a ceramic member; and b) first and second electrodes disposed adjacent the ceramic member such that a potential difference may be established between the first and second electrodes and through the ceramic member during operation; iii) a continuous insulating layer, or laminate of insulating layers, arranged to overlie each of the one or more electrical elements arranged on the first side of the substrate layer; and iv) a passivation layer, or laminate of multiple passivation layers, disposed adjacent to, and at least partially overlying, each of the one or more electrical elements so as to provide electrical passivation between the first and second electrodes of each of the one or more electrical elements; wherein: a) the passivation layer, or at least an innermost layer of the laminate of multiple passivation layers which is disposed adjacent each of the one or more underlying electrical elements, is discontinuous; and/or b) the laminate of multiple passivation layers is recessed at a side which faces away from each of the underlying electrical elements, wherein a recess is provided in a region overlying each of the one or more electrical elements, such that the laminate of passivation layers is thinner in a thickness direction across the recess compared to other non-recessed regions of the laminate of passivation layers.
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Patent Agency Ranking
公开(公告)号：US11910718B2
公开(公告)日：2024-02-20
申请号：US17014808
申请日：2020-09-08
Applicant: XAAR TECHNOLOGY LIMITED
Inventor： Peter Mardilovich , Susan Trolier-McKinstry
IPC: H10N30/85 , H10N30/06 , H10N30/078 , H10N30/87 , H10N30/00 , H10N30/20 , H10N30/853 , B41J2/14
CPC classification number: H10N30/85 , B41J2/14233 , H10N30/06 , H10N30/078 , H10N30/1051 , H10N30/2047 , H10N30/8554 , H10N30/87 , B41J2002/14266
Abstract: A piezoelectric thin film element having a first electrode, a second electrode and a piezoelectric thin film between the electrodes, wherein the thin film comprises a laminate having two or more piezoelectric thin film layers and wherein a first thin film layer is doped by one or more dopants and a second film layer is doped by one or more dopants and wherein at least one dopant of the second thin film layer is different from the dopant or dopants of the first thin film layer.
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公开(公告)号：US11770976B2
公开(公告)日：2023-09-26
申请号：US17294207
申请日：2019-11-15
Applicant: Xaar Technology Limited
Inventor： Andrew Vella , Peter Mardilovich
CPC classification number: H10N30/883 , B41J2/14274 , H10N30/10516 , H10N39/00
Abstract: The present invention relates to an electrical component for a microelectromechanical systems (MEMS) device, in particular, but not limited to, an electromechanical actuator. In one aspect, the present invention provides an electrical component for a microelectromechanical systems device comprising: i) a substrate layer; ii) a plurality of adjacent electrical elements arranged over the substrate layer, where each electrical element is separated from a neighbouring electrical element by an intermediate region, each of the plurality of electrical elements comprising: a) a ceramic member; and b) first and second electrodes disposed adjacent the ceramic member such that a potential difference may be established between the first and second electrodes and through the ceramic member during operation; iii) a passivation layer, or a laminate of multiple passivation layers, at least partially overlying each of the plurality of electrical elements so as to provide electrical passivation between the first and second electrodes of each of the plurality of electrical elements; wherein the passivation layer, or at least an innermost layer of the laminate of passivation layers which is disposed adjacent each underlying electrical element, is discontinuous over at least one intermediate region between neighbouring electrical elements of the electrical component.
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公开(公告)号：US10532572B2
公开(公告)日：2020-01-14
申请号：US15563518
申请日：2016-03-18
Applicant: Xaar Technology Limited
Inventor： Robert Errol McMullen , Peter Mardilovich
IPC: B41J2/14
Abstract: An inkjet printhead having a fluidic chamber substrate, the fluidic chamber substrate having at least two droplet units provided in an array therein, the droplet units comprising: a fluidic chamber, a first fluidic port provided at a first surface of the fluidic chamber substrate, wherein the first fluidic port is in fluidic communication with the fluidic chamber, a nozzle formed in a nozzle layer provided at a second surface of the fluidic chamber substrate; and a vibration plate provided at the first surface of the fluidic chamber substrate, the vibration plate comprising an actuator for effecting pressure fluctuations within the fluidic chamber; and wherein the droplet units are arranged adjacent each other about an axis extending substantially in a width direction of the droplet units, wherein the first fluidic ports of the droplet units are staggered a first stagger offset distance from each other substantially in a length direction of the droplet units, and wherein a wiring layer extends over the first surface of the fluidic chamber substrate and between the first fluidic ports.
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公开(公告)号：US20190030885A1
公开(公告)日：2019-01-31
申请号：US16072559
申请日：2016-12-22
Applicant: XAAR TECHNOLOGY LIMITED
Inventor： Song-Won Ko , Peter Mardilovich , John Philip Tatum , Alexandru Cazacu
CPC classification number: B41J2/04505 , B41J2/04573 , B41J2/04581 , B41J2/14201 , B41J2/14209 , B41J2/1607 , B41J2/1609 , B41J2/164 , B41J2/1642 , B41J2002/14225
Abstract: A droplet deposition head having a fluid chamber connected to a droplet ejection nozzle and to a reservoir for the fluid, and a piezoelectric actuator element formed at least in part by a fluid chamber wall having an electrode thereon, which element is displaceable in response to a drive voltage to generate a pressure in the chamber to eject a droplet of fluid from the chamber through the nozzle wherein the electrode is provided with a passivation coating which comprises, at least in part, a laminate comprising an inorganic insulating layer nearest to or contacting the electrode and an organic insulating layer overlying the inorganic insulating layer wherein defects in the insulating layers tend to be misaligned at the interface there between and wherein the inorganic insulating layer has thickness less than or equal to 500 nm and the organic insulating layer has a thickness less than 3 μm.
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公开(公告)号：US20180086076A1
公开(公告)日：2018-03-29
申请号：US15563518
申请日：2016-03-18
Applicant: Xaar Technology Limited
Inventor： Robert Errol McMullen , Peter Mardilovich
IPC: B41J2/14
Abstract: An inkjet printhead having a fluidic chamber substrate, the fluidic chamber substrate having at least two droplet units provided in an array therein, the droplet units comprising: a fluidic chamber, a first fluidic port provided at a first surface of the fluidic chamber substrate, wherein the first fluidic port is in fluidic communication with the fluidic chamber, a nozzle formed in a nozzle layer provided at a second surface of the fluidic chamber substrate; and a vibration plate provided at the first surface of the fluidic chamber substrate, the vibration plate comprising an actuator for effecting pressure fluctuations within the fluidic chamber; and wherein the droplet units are arranged adjacent each other about an axis extending substantially in a width direction of the droplet units, wherein the first fluidic ports of the droplet units are staggered a first stagger offset distance from each other substantially in a length direction of the droplet units, and wherein a wiring layer extends over the first surface of the fluidic chamber substrate and between the first fluidic ports.
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