一种显微高光谱成像平台及大区域数据立方体采集的方法

    公开(公告)号:CN109489816A

    公开(公告)日:2019-03-19

    申请号:CN201811236368.2

    申请日:2018-10-23

    CPC classification number: G01J3/2823 G01J2003/284

    Abstract: 本发明公开了一种显微高光谱成像平台及大区域数据立方体采集的方法,本发明采用光学显微镜、三轴电动载物台、分光器、声光可调谐滤波器、灰度相机及工业控制计算机构成成像平台,并应用成像平台依次完成生成任务采集序列、显微高光谱图像的采集、对显微高光谱图像进行拼接及生成大区域数据立方体的步骤,本发明利用高光谱图像具有较大空间冗余度的特点,通过对显微高光谱图像各子区域图像的有效拼合,形成大视场、大区域的显微高光谱图像,为医生诊断提供完整的显微图像,有效提升诊断的准确率与工作效率。

    MEASUREMENT APPARATUS AND MEASUREMENT METHOD
    7.
    发明申请
    MEASUREMENT APPARATUS AND MEASUREMENT METHOD 有权
    测量装置和测量方法

    公开(公告)号:US20160139034A1

    公开(公告)日:2016-05-19

    申请号:US14657209

    申请日:2015-03-13

    Inventor: Toru MIKAMI

    Abstract: In accordance with an embodiment, a measurement apparatus includes a library creation unit, a spectral profile acquiring unit, and a measurement unit. The library creation unit creates a library in which a layer stack model is matched to a theoretical profile regarding a pattern of stacked layers. The spectral profile acquiring unit acquires an actual measured profile by applying light to a measurement target pattern obtained when the pattern is actually created. The measurement unit measures the sectional shape of the measurement target pattern by performing fitting of the theoretical profile to the actual measured profile. The layer stack model is created by calculating a feature value that reflects the intensity of reflected light from an interface for each of the layers, determining a priority order of analysis from the feature value, and sequentially performing fitting of the theoretical profile to the measured profile in the determined priority order.

    Abstract translation: 根据实施例,测量装置包括库创建单元,光谱轮廓获取单元和测量单元。 库创建单元创建库,其中层堆栈模型与关于层叠图案的理论简档相匹配。 光谱轮廓获取单元通过将光施加到当实际创建图案时获得的测量目标图案来获取实际测量的轮廓。 测量单元通过将理论曲线拟合到实际测量曲线来测量测量目标图案的截面形状。 通过计算反映来自每个层的界面的反射光的强度的特征值来创建层堆叠模型,从特征值确定分析的优先级顺序,并且顺序地将理论分布拟合到测量的轮廓 以确定的优先顺序。

    Method and device for spectral reconstruction
    8.
    发明授权
    Method and device for spectral reconstruction 失效
    光谱重建方法和装置

    公开(公告)号:US4642778A

    公开(公告)日:1987-02-10

    申请号:US585575

    申请日:1984-03-02

    CPC classification number: G01J3/28 G01N21/3577 G01J2003/284 G01J2003/2866

    Abstract: A method is presented for spectral reconstruction which comprises first obtaining component concentrations of a series of mixtures, which component concentrations constitute a set of reference values. The spectral value of each member of that series of mixtures is measured at a first wavelength, which spectral value possesses contribution from individual components in the mixture, whose individual contribution is unknown. The spectral values for the series of mixtures are then mathematically cross-correlated with the component concentrations in said series of mixtures, at the first wavelength, thereby obtaining the spectral contribution for said components at that first wavelength. The spectral value of each member of that series of mixtures is measured at the second wavelength, which spectral values are then cross-correlated with component concentrations in the series of mixtures thereby obtaining the spectral contribution for said components at the second wavelength. This operation is repeated for a series of wavelengths until the spectrum of the desired component in the mixture is reconstructed. Devices are presented which implement the methods for spectral reconstruction of the present invention.

    Abstract translation: 提出了一种用于光谱重建的方法,其包括首先获得一系列混合物的组分浓度,该组分浓度构成一组参考值。 该系列混合物的每个成员的光谱值在第一波长处测量,该光谱值具有来自混合物中各个成分的贡献,其个体贡献是未知的。 然后,该系列混合物的光谱值在第一波长处与所述混合物系列中的组分浓度数学上交叉相关,由此获得在该第一波长处的所述组分的光谱贡献。 在第二波长处测量该系列混合物的每个成员的光谱值,该光谱值然后与该系列混合物中的成分浓度交叉相关,从而获得第二波长处的所述成分的光谱贡献。 对于一系列波长重复该操作,直到重构混合物中所需组分的光谱。 给出了实现本发明的光谱重建方法的装置。

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