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公开(公告)号:JPH0896349A
公开(公告)日:1996-04-12
申请号:JP23125594
申请日:1994-09-27
Applicant: KAO CORP
Inventor: SHIGA AKIRA , KITAORI NORIYUKI , YOSHIDA OSAMU , MIZUNOYA HIROHIDE , WAKABAYASHI SHIGEMI
Abstract: PURPOSE: To provide a magnetic recording medium having satisfactory durability, excellent in S/N, capable of high density recording and having high performance. CONSTITUTION: Two or more magnetic layers 2, 3 are formed on a substrate 1 to obtain the objective magnetic recording medium. The lower magnetic layer 2 is a metallic thin film type magnetic layer and the upper magnetic layer 3 is a coating film type magnetic layer contg. platy metallic magnetic powder having its axis of easy magnetization in the plate surface.
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公开(公告)号:JPH0860364A
公开(公告)日:1996-03-05
申请号:JP19250394
申请日:1994-08-16
Applicant: KAO CORP
Inventor: MIZUNOYA HIROHIDE , KITAORI NORIYUKI , YOSHIDA OSAMU , WAKABAYASHI SHIGEMI , SHIGA AKIRA
IPC: C23C16/26 , C23C16/27 , C23C16/50 , C23C16/511 , G11B5/84
Abstract: PURPOSE: To obtain a diamond-like carbon film having much diamond structure by executing introduction of a reactive gas into a plasma reaction tube and arrangement of bulk diamond at the time of forming the above film by a plasma CVD method. CONSTITUTION: The diamond-like carbon film is formed on a raw sheet 1 of a magnetic recording medium existing in a position facing the plasma reaction tube 5 by, for example, an ECR plasma CVD apparatus. Gaseous hydrocarbon is supplied via a spherical perforated body 6a at the front end of a pipe 6 to the plasma reaction tube 5 in this method. The bulk diamond 9 is held and disposed by a holder 10 in the position deviated by l/8 to the raw sheet 1 side from the ECR point in the plasma reaction tube 5. As a result, the diamond 9 is sputtered by the plasma at the time of the film formation, by which the clusters consisting of the diamond are formed and, therefore, the film to be formed has the ample diamond structure.
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公开(公告)号:JPH0855323A
公开(公告)日:1996-02-27
申请号:JP18932494
申请日:1994-08-11
Applicant: KAO CORP
Inventor: YOSHIDA OSAMU , KITAORI NORIYUKI , MIZUNOYA HIROHIDE , WAKABAYASHI SHIGEMI , SHIGA AKIRA
Abstract: PURPOSE:To obtain a magnetic recording medium having excellent electromagnetic conversion characteristics and good durability by controlling the thickness of an oxide film between a metal thin film type magnetic film and a protective film to 10nm thickness. This raw sheet having the metal magnetic film 22 is subjected to such a treatment that half or more of the oxide film 22b covering the magnetic columns 22a is removed by using a plasma etching device and a plasma CVD device to 2nm thickness. Then a diamond-like carbon film 23 is formed to 6nm thickness by using a plasma CVD device, on which a perfluoropolyether soln. is applied by die coating method to obtain 20Angstrom dry film thickness and then dried to form a lubricant layer 24.
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公开(公告)号:JPH0849078A
公开(公告)日:1996-02-20
申请号:JP18378494
申请日:1994-08-04
Applicant: KAO CORP
Inventor: WAKABAYASHI SHIGEMI , KITAORI NORIYUKI , YOSHIDA OSAMU , MIZUNOYA HIROHIDE , SHIGA AKIRA
Abstract: PURPOSE:To continuously operate the device for a long time without significantly lowering the film forming efficiency by blowing a gaseous etchant against the specified position of the inner wall of a plasma reaction tube to which a reacting gas is supplied. CONSTITUTION:Gaseous hydrocarbons supplied to a plasma reaction tube 5 from a pipe 6 is converted to plasma by the microwave introduced from a waveguide 7 to form a diamondlike carbon film on a substrate. In this thin film forming device by ECR microwave plasma CVD, a cylinder 10 pierced with many minute holes 11 communicating with a pipe 12 is provided in the reaction tube 5 communicating with the waveguide 7. A gaseous etchant such as hydrogen and oxygen is blown from the hole 11 against the inner wall of the tube at a position closer to the substrate than the ECR point of the inner wall by 1/8 to 3/8 lambda (lambda is the wavelength of the gaseous etchant). Consequently, the diamondlike carbon depositing on the inner wall is removed, and the film forming efficiency is not lowered.
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公开(公告)号:JPH0841628A
公开(公告)日:1996-02-13
申请号:JP17405494
申请日:1994-07-26
Applicant: KAO CORP
Inventor: KITAORI NORIYUKI , YOSHIDA OSAMU , MIZUNOYA HIROHIDE , WAKABAYASHI SHIGEMI , SHIGA AKIRA
Abstract: PURPOSE:To provide a technique for producing for producing a metallic film body in which variance is hard to occur in the metallic film to be formed, furthermore, waste is small in the film forming, and moreover, contamination is hard to occur. CONSTITUTION:This device has a close type vessel main body 6a charged with a metallic material to form a source of a metallic film which is constituted on a supporting body, an induction cylindrical part 6b installed in the vessel main body 6a, an outer vessel 6c charged with a vessel main body 6b, a molten metal source 8 filled into the outer vessel 6c and a heating means 9 melting the molten metal source 8. By the melting of the molten metal source 8 with the heating means, the metallic material in the vessel main body 6a is heated and melted, and the evaporated metallic particles are guided to the same induction cylindrical part 6b and are adhered to the surface of a supporting body in the direction of the induction cylindrical part 6b.
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公开(公告)号:JPH07331438A
公开(公告)日:1995-12-19
申请号:JP12595394
申请日:1994-06-08
Applicant: KAO CORP
Inventor: KITAORI NORIYUKI , YOSHIDA OSAMU , MIZUNOYA HIROHIDE , WAKABAYASHI SHIGEMI , SHIGA AKIRA
Abstract: PURPOSE:To uniformly and efficiently form a magnetic film and a backcoat film in the device for producing a metallic film body with a metallic film formed on both sides of a substrate by dry plating by using one cooling can roll to form the magnetic film and backcoat film. CONSTITUTION:A substrate 1 is traveled from a feed roll 16a to a winding roll 16b, and a vacuum vessel 10 is evacuated to a specified vacuum. A backcoat film forming alloy 18a in a crucible 17a is then heated by an electron beam and vaporized, and the alloy 18a is vapor-deposited on the rear of the substrate 1 wound on a cooling can roll 12 to form a backcoat film. The substrate is reversed while passing through guide rollers 13 and 14, and an alloy in a second crucible is vapor-deposited on the front of the substrate 1 to form a magnetic film.
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公开(公告)号:JPH07320265A
公开(公告)日:1995-12-08
申请号:JP10879794
申请日:1994-05-23
Applicant: KAO CORP
Inventor: KITAORI NORIYUKI , YOSHIDA OSAMU , MIZUNOYA HIROHIDE , WAKABAYASHI SHIGEMI , SHIGA AKIRA
Abstract: PURPOSE:To obtain a magnetic recording medium having excellent magnetic characteristics, such as coercive force, by setting the nozzle port of a nozzle for casting an oxidative gas in such a manner that the nozzle port exists in the same direction as the min. incident angle of magnetic particles flying toward a base. CONSTITUTION:The nozzle 5 exists on the rear side of a shielding plate 4 and the nozzle port 5a of the nozzle 5 is disposed in extreme proximity to the front end of this shielding plate 4. The angle of the direction of the nozzle port 5 is so set as to be theta2 (the same angle as the min. incident angle theta1 of the incoming magnetic particles). The inside of a vacuum vessel 9 is first evacuated. The base 3 is let off from a supply side 2a, is brought into contact with a cooling can roll 1 along this roll and is successively taken up on a take-up side roll 2b. Electron beams are shot as shown by arrows from an electron gun 8 in this state and are cast to the magnetic alloy 7 in a crucible 6 to evaporate the particles of the alloy 7. These particles fly, stick and deposit on the base 3 brought into contact with the roll 1 along the roll at an angle of the min. incident angle theta1.
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公开(公告)号:JPH07296378A
公开(公告)日:1995-11-10
申请号:JP8287994
申请日:1994-04-21
Applicant: KAO CORP
Inventor: KITAORI NORIYUKI , YOSHIDA OSAMU , MIZUNOYA HIROHIDE , WAKABAYASHI SHIGEMI , SHIGA AKIRA
IPC: G11B5/84
Abstract: PURPOSE:To reduce the production cost by a constitution wherein a lubricant blown into a vacuum tank is evaporated so as to be directed in the direction different from the blowing direction and to adhere in order to enhance the workability. CONSTITUTION:After evacuating a first vacuum tank to 10 -10 Torr, a magnetic metal 5 in a crucible 4 is evaporated by resistance heating, high frequency heating, electron beam heating, etc., to deposit a magnetic film. It is then subjected to oxidation and introduced to the second vacuum tank 1b side. In this regard, a lubricant solution is jetted through a jet nozzle 10 into the second vacuum tank 1b to produce a misty atmosphere of lubricant solution under a heating can roll 9. Consequently, the lubricant is evaporated smoothly and adheres onto the magnetic film by 10-30Angstrom thickness.
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公开(公告)号:JPH07272241A
公开(公告)日:1995-10-20
申请号:JP6597894
申请日:1994-04-04
Applicant: KAO CORP
Inventor: KITAORI NORIYUKI , YOSHIDA OSAMU , MIZUNOYA HIROHIDE , WAKABAYASHI SHIGEMI , SHIGA AKIRA
Abstract: PURPOSE:To obtain a technique of transferring information signals which are small in demagnetization of a mother tape and with which good output is obtainable. CONSTITUTION:This magnetic recording medium is a second magnetic recording medium to which the information signals recorded on a first magnetic recording medium are transferred. This second magnetic recording medium is formed by providing the surface of a base with n (n is an integer of >=2) of magnetic metallic thin films. These magnetic metallic thin films are so constituted as to satisfy Bs1>Bs2>...>Bsn. Hc1p>(1.2)Hc2P>...>(1.2) HcnP. Hc1h>(1.5)Hc2h>...>(1.5) Hcnh when the saturation magnetic flux densities from the first magnetic film existing in a position furthest from the base of the magnetic films described above to the n-th magnetic film existing in a position nearest the base are successively designated as Bs1 to Bsn, the coercive forces in the longitudinal direction successively as Hc1p to Hcnp and the coercive force in the perpendicular direction successively as Hc1h to Hcnh.
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公开(公告)号:JPH07254145A
公开(公告)日:1995-10-03
申请号:JP4438394
申请日:1994-03-15
Applicant: KAO CORP
Inventor: KITAORI NORIYUKI , YOSHIDA OSAMU , MIZUNOYA HIROHIDE , WAKABAYASHI SHIGEMI , SHIGA AKIRA
IPC: G11B5/84
Abstract: PURPOSE:To increase the ratio of diamond bonds of a carbon film and to improve the function as a protective layer of a magnetic film by irradiating the carbon film with active energy in a stage for forming the carbon film. CONSTITUTION:A magnetic recording medium 1 provided with the Co magnetic film by depositing Co particles on a polyimide film by using an ordinal diagonal vapor deposition device is made to travel from a supply side roll 3a disposed in a vacuum vessel 2 of a microwave plasma CVD device to a take-up side roll 3b via a cooling can roller 4. A CVD device 5 is then operated to blow the plasma of a gaseous mixture composed of CH4 and H2 on the Co magnetic film of the magnetic recording medium 1 held in contact with the cooling can roller 4 along therewith, thereby forming the carbon film. The protective layer of the magnetic film of the magnetic recording medium is formed by irradiating the carbon film with UV rays of a wavelength 50nm at the time of forming the carbon film.
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