Metal gasket for a semiconductor fabrication chamber
    92.
    发明授权
    Metal gasket for a semiconductor fabrication chamber 失效
    用于半导体制造室的金属衬垫

    公开(公告)号:US06833621B2

    公开(公告)日:2004-12-21

    申请号:US10315230

    申请日:2002-12-10

    Abstract: A metal gasket for a semiconductor fabrication chamber capable of preventing base plate metal contamination in the chamber, wherein the metal gasket includes a diffusion barrier layer interposed between a base plate and an anti-corrosive coating layer, and wherein the diffusion barrier layer prevents elements of the base plate from being diffused to the anti-corrosive coating layer. Accordingly, the diffusion barrier layer prevents attack on the anti-corrosive coating layer.

    Abstract translation: 一种用于半导体制造室的金属衬垫,能够防止腔室中的底板金属污染,其中金属衬垫包括介于基板和防腐蚀涂层之间的扩散阻挡层,并且其中扩散阻挡层防止 基板被扩散到防腐蚀涂层。 因此,扩散阻挡层防止对防腐蚀涂层的侵蚀。

    Fluid actuated generator
    93.
    发明授权
    Fluid actuated generator 失效
    流体致动发电机

    公开(公告)号:US06606857B1

    公开(公告)日:2003-08-19

    申请号:US10085928

    申请日:2002-02-28

    Abstract: A fluid actuated power assembly for generating power from a pressurized fluid. A tube is provided for siphoning fluid from a body of water to a vane motor. A generator is coupled to the vane motor to produce electricity. The tube is preferably modular and adaptable to a plurality of configurations. This allows the entire assembly to be portable and adaptable to many different types of fluid sources.

    Abstract translation: 一种用于从加压流体产生动力的流体致动动力组件。 设置有用于将流体从水体虹吸到叶片马达的管。 发电机联接到叶片电动机以产生电力。 管优选地是模块化的并且可适应于多种构造。 这允许整个组件可移植并适应于许多不同类型的流体源。

    Linear pump
    94.
    发明授权
    Linear pump 失效
    线性泵

    公开(公告)号:US5924975A

    公开(公告)日:1999-07-20

    申请号:US686618

    申请日:1996-07-19

    Abstract: A linear pump includes a housing having a bore and axially spaced apart inlet and outlet. A first check valve is joined to the housing for controlling flow of fluid through the bore. A piston is disposed coaxially in the housing bore for axial translation therein and includes a piston bore and axially spaced apart inlet and outlet. A second check valve is joined to the piston for controlling fluid flow through the piston bore. A linear motor includes a plurality of axially adjoining drive coils disposed in the housing, and a pair of axially spaced apart magnet rings disposed in the piston and spaced radially inwardly of the drive coils for magnetically cooperating therewith to axially oscillate the piston in the housing for cyclically pumping the fluid in turn through the housing and piston inlets and outlets in unidirectional flow through the housing and piston bores.

    Abstract translation: 线性泵包括具有孔和轴向间隔开的入口和出口的壳体。 第一止回阀连接到壳体,用于控制通过孔的流体的流动。 活塞同轴地布置在壳体孔中,用于在其中轴向平移,并且包括活塞孔和轴向间隔开的入口和出口。 第二止回阀连接到活塞以控制流过活塞孔的流体。 线性电动机包括设置在壳体中的多个轴向相邻的驱动线圈和一对轴向间隔开的磁环,该磁环设置在活塞中并与驱动线圈径向向内间隔开,用于与驱动线圈磁性配合,以使壳体中的活塞轴向振荡 循环地将流体循环地泵送通过壳体和活塞入口和出口,以单向流动通过壳体和活塞孔。

    모터 또는 압축기용 하우징
    95.
    发明公开
    모터 또는 압축기용 하우징 审中-实审
    电机或压缩机的外壳

    公开(公告)号:KR1020170109566A

    公开(公告)日:2017-09-29

    申请号:KR1020177021377

    申请日:2016-01-28

    Abstract: 본발명과관련해서 2개의단부면(31a, 31b)을가진긴 크랭크케이스(31)를포함하는모터또는압축기용하우징(3, 5)이개발되었다. 또한, 적어도하나의실린더챔버(32a, 32b)가제공되고, 상기실린더챔버내에서크랭크샤프트의회전에의해피스톤의이동이야기된다. 크랭크케이스의내경은제1 단부면으로부터제2 단부면을향해단조적으로테이퍼링된다. 이렇게성형된크랭크케이스는성형맨드릴(34)의둘레에실행되는주조에의해특히간단하게제조될수 있다. 이러한성형맨드릴도, 주조후에제1 단부에서하우징으로부터빼내질수 있도록, 단조적으로테이퍼링되어야한다. 직선실린더형상의크랭크케이스는이러한간단한방법으로제조될수 없다. 크랭크케이스의본 발명에따른이러한성형에의해하우징은하나의부분으로그리고동시에매우콤팩트하게구성될수 있다.

    Abstract translation: 在本发明的上下文中已经开发了用于马达或压缩机的壳体3,5,其包括具有两个端面31a,31b的长曲轴箱31。 另外,设置至少一个气缸室32a,32b,并且通过气缸室中的曲轴组件来描述活塞的运动。 曲轴箱的内径从第一端面朝向第二端面单调地逐渐变细。 这样形成的曲轴箱可以特别简单地通过围绕成形心轴34进行铸造来制造。 这种成型心轴也必须是单调的锥形,以便在铸造后的第一端可以将其拉出壳体。 直筒形曲轴箱不能用这种简单的方法制造。 通过根据本发明的曲轴箱的这种模制,壳体可以构造成一个部件并且同时非常紧凑。

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