METHOD AND APPARATUS FOR ANALYSIS OF NITROGEN

    公开(公告)号:US20180059009A1

    公开(公告)日:2018-03-01

    申请号:US15506401

    申请日:2015-09-01

    Abstract: There is provided a nitrogen analyzing method for quantitative analysis of nitrogen in a specimen by a chemiluminescence method using ozone which is capable of measuring a concentration of nitrogen contained in the specimen with still higher accuracy, as well as a nitrogen analyzer used for practicing the analyzing method. Also, according to the present invention, there is provided a nitrogen analyzing method and a nitrogen analyzer which have a less adverse influence on human body and are also capable of further reducing environmental burden even when analyzing nitrogen in fuel-related specimens. The nitrogen analyzing method according to the present invention comprises the steps of burning a specimen comprising a nitrogen compound to generate a specimen gas, allowing the resulting specimen gas to react with ozone to measure a chemiluminescence intensity thereof, and quantitatively determining a concentration of nitrogen in the specimen based on a previously prepared calibration curve expressing a relationship between the chemiluminescence intensity and a weight of nitrogen, wherein the calibration curve is previously prepared from a standard specimen having a nitrogen concentration of 5 to 100 ppm, and the specimen is used in the form of a diluted specimen prepared by diluting the specimen with a solvent into a nitrogen concentration of 5 to 100 ppm.

    Defect inspection method and device for same

    公开(公告)号:US09488596B2

    公开(公告)日:2016-11-08

    申请号:US14978372

    申请日:2015-12-22

    CPC classification number: G01N21/9501 G01N21/8851 G01N21/956 G01N2201/06

    Abstract: In defect scanning carried out in a process of manufacturing a semiconductor or the like, a light detection optical system comprising a plurality of photosensors is used for detecting scattered light reflected from a sample. The photosensors used for detecting the quantity of weak background scattered light include a photon counting type photosensor having few pixels whereas the photosensors used for detecting the quantity of strong background scattered light include a photon counting type photosensor having many pixels or an analog photosensor. In addition, nonlinearity caused by the use of the photon counting type photosensor as nonlinearity of detection strength of defect scattered light is corrected in order to correct a detection signal of the defect scattered light.

    Defect inspection method and device for same
    97.
    发明授权
    Defect inspection method and device for same 有权
    缺陷检查方法和装置相同

    公开(公告)号:US09255888B2

    公开(公告)日:2016-02-09

    申请号:US14359221

    申请日:2012-10-22

    CPC classification number: G01N21/9501 G01N21/8851 G01N21/956 G01N2201/06

    Abstract: In defect scanning carried out in a process of manufacturing a semiconductor or the like, a light detection optical system comprising a plurality of photosensors is used for detecting scattered light reflected from a sample. The photosensors used for detecting the quantity of weak background scattered light include a photon counting type photosensor having few pixels whereas the photosensors used for detecting the quantity of strong background scattered light include a photon counting type photosensor having many pixels or an analog photosensor. In addition, nonlinearity caused by the use of the photon counting type photosensor as nonlinearity of detection strength of defect scattered light is corrected in order to correct a detection signal of the defect scattered light.

    Abstract translation: 在制造半导体等的过程中进行的缺陷扫描中,使用包含多个光电传感器的光检测光学系统来检测从样品反射的散射光。 用于检测弱背景散射光量的光传感器包括具有少量像素的光子计数型光电传感器,而用于检测强背景散射光量的光电传感器包括具有许多像素的光子计数型光电传感器或模拟光电传感器。 此外,为了校正缺陷散射光的检测信号,对使用光子计数型光电传感器作为非线性的缺陷散射光的检测强度引起的非线性进行了修正。

    Inspection Apparatus, Inspection Method, And Program
    98.
    发明申请
    Inspection Apparatus, Inspection Method, And Program 有权
    检验仪器,检验方法和程序

    公开(公告)号:US20150358602A1

    公开(公告)日:2015-12-10

    申请号:US14718109

    申请日:2015-05-21

    Inventor: Norimasa Mayumi

    Abstract: A photometric processing part calculates a normal vector of a surface of a workpiece from a plurality of luminance images acquired by a camera in accordance with the photometric stereo method, and performs synthesis processing of synthesizing at least two images out of an inclination image made up of pixel values based on the normal vector calculated from the plurality of luminance images and at least one reduced image of the inclination image, to generate an inspection image showing a surface shape of the inspection target. In particular, a characteristic size setting part sets a characteristic size which is a parameter for giving weight to a component of a reduced image at the time of performing the synthesis processing. The photometric processing part can generate a different inspection image in accordance with the set characteristic size.

    Abstract translation: 测光处理部根据光度立体声方法从由照相机获取的多个亮度图像中计算工件的表面的法线矢量,并且进行合成处理,从由以下方式构成的倾斜图像中合成至少两个图像: 基于从多个亮度图像计算的法线矢量和倾斜图像的至少一个缩小图像的像素值,以生成示出检查对象的表面形状的检查图像。 特别地,特征尺寸设定部设定作为对进行合成处理时的缩小图像的分量赋予权重的参数的特性尺寸。 测光处理部可以根据设定的特征尺寸生成不同的检查图像。

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